Hitachi, Ltd.

Nikon Corporation

Dai Nippon Printing Co., Ltd.

Fuji Photo Film Company, Limited

Fujinon Corporation

Hiatchi, Ltd.

Kouji Yoshida

Toshinori Hirataka

Kimio Tatsuno

Takeshi Kato

Yutaka Senda

Takayuki Sakamoto

Masato Shishikura

Koji Ichimura

Takaharu Nagai

Tatemi Ido

Katsutoshi Suzuki

Hiroshi Naka

Shoichi Takahashi

Norihiro Yazaki

Shinji Tsuji

Naoko Nakata

Mitsuru Ohi

Kenji Kogo

Akiyuki Harada

Yuuji Kokumai

Takayuki Kai

Naoshi Kawamata

Shinichi Tatemichi

Shinji Harada

Hiroki Oogi

Koji Sasao

Kouichi Shinmura

Kazuhiro Tutui

A template and a template blank are used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, in which a first step structure is formed on a main surface of a base, a second step structure is formed on the first step structure, and an outside region of the second step structure on an upper surface of the first step structure is covered with a light shielding film to solve the above problem.

Production method of template, template blank, and template substrate for imprinting, production method of template for imprinting, and template

An imprint mold has a base, an uneven structure area set on a surface of the base, a measurement area set in the uneven structure area, and a measurement mark structure positioned in the measurement area, the measurement mark structure having a plurality of pattern sets each having a line/space shape. With this, a deformation occurring in a resin layer at the time of release of the resin layer from the mold is prevented, and a measurement mark can be formed with high accuracy.

Imprint mold and imprint method

Work table for endoscope

A template creating unit () creates a waveform template formed of expectations of a signal waveform of the value of each parameter and a probability template formed of information on occurrence probability of each expectation of the parameters on the basis of the signal waveform measured. A matching judging unit () performs template matching of another signal waveform measured while using the expectation occurrence probability information included in the probability template as weight information for each parameter value. Further the template creating unit () creates a waveform template and a probability template considering the measured another signal waveform and prepares for the next pattern matching. Thus template matching is performed with improved matching accuracy for waveform of a signal varying with the value of a parameter.

Pattern matching method and device, position determining method and device, position aligning method and device, exposing method and device, and device and its production method

In view of a specific area having a characteristic surface state in a mark-formed area or a surrounding area thereof, an area calculation unit has a window having a dimension corresponding to the specific area scan the whole measurement area in order to obtain a quantity representing a surface state based on measured signals through the window, and then, by identifying a measured signal area corresponding to the specific area based on the quantity as a function of the window's position, extracts a measured signal area corresponding to the mark. And a position calculation unit performs computation such as pattern-matching on the signal area extracted, thereby detecting the position of the mark accurately and quickly.

Mark detection method and unit, exposure method and apparatus, and device manufacturing method and device

An LD module capable of generating a good optical waveform at a high speed of about 10 Gbit/s or higher in which a damping resistor is disposed in parallel with a laser-diode device in the inside of a laser-diode module, the damping resistor being preferably disposed between the connection point of the high-frequency transmission line and the terminating resistor, and the ground.

Laser-diode module, optical transceiver and fiber transmission system

A parameter calculation unit statistically calculates the estimations and their certainty of a predetermined number of parameters, which uniquely specify any position on an object, for each of a plurality of measured sample sets on the basis of position information of marks composing the sample set. A valid value calculation unit calculates statistically valid values of the predetermined number of parameters on the basis of groups of the estimations and their certainty of the predetermined number of parameters for the respective sample sets. Furthermore, an evaluation unit statistically evaluates if the number of marks composing a sample set can be reduced. If it is determined that the number of marks can be reduced, the parameter calculation unit calculates values of the predetermined number of parameters by using a new sample set having reduced number of marks. Using the values of the predetermined number of parameters calculated in this manner, the position of any area on the object can be accurately detected.

Position detection method and position detector, exposure method and exposure apparatus, and device and device manufacturing method

A statistical processing unit compares the gray levels at identical positions in raw and reference images using a raw image having three or more gray levels obtained by sensing an object by an image pick-up unit. As the reference image, a predetermined designed image or at least one shift image obtained by shifting the raw image by an integer multiple of the repetition period in the repetition direction of a specific pattern is used. The statistical processing unit statistically analyzes the occurrence state of the difference between the raw and reference images, thus accurately obtaining the formation state of repetitive patterns on the object.

Inspection method and apparatus

Optical module and optical communication system

Module for optical communication

Optical module

The imaging signal (the raw waveform) and the modified waveform are obtained, wherein the raw waveform is obtained from the image of the mark which is picked-up by the image pick-up device, and the modified waveform is obtained through the modification of the imaging signal by the waveform modifying unit. By using respective raw wave form and modified waveform, the mark information calculating unit obtains the mark information for the mark position such as estimated mark position and so forth. Then, the position calculating unit detects the positional information of the mark based on the plural mark information in the obtained mark information. As a result, the mark position might be precisely detected depending on the figure of the noise signal.

Position detecting method, position detecting unit, exposure method, exposure apparatus, and device manufacturing method

Camera

An optical transmission module or an optical module has a receptacle attached adjacent to an optical component module or package, and a plug configured to connect vertically with the receptacle from above the module. The outer peripheral shape of the housing is designed to fit within an area of the receptacle that faces upwardly to receive the plug in an insertion direction extending vertically downwardly. In the housing of the plug, a ferrule is attached to an end of an optical fiber and a sleeve covers the optical fiber and the ferrule. A knob is used for moving the optical fiber, the sleeve and the ferrule in the lightwave propagation direction, which is transverse to the plug insertion direction.

Optical transmission module for achieving an optimum optical connection and useful for high density mounting

Growing community of inventors

Tokyo, Japan

Kouji Yoshida