Kioxia Corporation

Kouji Matsuo

Fumitaka Arai

Keiji Hosotani

Ryo Fukuoka

Shinya Naito

Hiroaki Kosako

Tadayoshi Watanabe

Takayuki Kakegawa

According to one embodiment, a semiconductor memory device includes: a first semiconductor extending in a first direction parallel to a substrate; a first conductor extending in a second direction perpendicular to the first direction; a first charge storage layer surrounding the first conductor; a first insulator provided between the first conductor and the first charge storage layer; a second insulator provided between the first charge storage layer and the first semiconductor, wherein an outer circumference of a portion of the second insulator is in contact with the first semiconductor; and a first memory cell including the first conductor, the first semiconductor, a portion of the first charge storage layer, a portion of the first insulator, and the portion of the second insulator.

Semiconductor memory device

A semiconductor memory device includes a memory cell array and a peripheral circuit. The peripheral circuit includes a plurality of first nodes disposed corresponding to a plurality of first via electrodes, a charging circuit that charges the plurality of first nodes, a discharging circuit that discharges the plurality of first nodes, an address select circuit that electrically conducts one of the plurality of first nodes with the charging circuit or the discharging circuit in response to an input address signal, a plurality of first transistors each disposed in a current path between two of the plurality of first nodes, and a plurality of amplifier circuits that are disposed corresponding to the plurality of first via electrodes and include input terminals connected to any of the plurality of first nodes and output terminals connected to any of the plurality of first via electrodes.

A semiconductor memory device includes memory block regions arranged in a first direction, a hook-up region arranged in the first direction with respect to memory block regions, and a wiring region extending in the first direction and arranged with memory block regions and the hook-up region in a second direction. Each of memory block regions includes memory strings extending in the first direction and arranged in the second direction and a first wiring extending in the second direction and connected to memory strings in common. The wiring region includes a second wiring extending in the first direction and connected to first wirings corresponding to memory block regions in common. The hook-up region includes a third wiring connected to the second wiring and a contact electrode extending in a third direction and connected to the third wiring.

A semiconductor memory device includes first memory layers and second memory layers arranged in alternation in a first direction. First memory layers and second memory layers include memory strings and first wirings connected to these memory strings in common. First memory layers and second memory layers include: signal amplifier circuits electrically connected to the first wirings; second wirings connected to the signal amplifier circuits; first switch transistors connected to the second wirings; third wirings electrically connected to the second wirings via the first switch transistors; and fourth wirings electrically connected to the second wirings without via the first switch transistors. The semiconductor memory device includes: first via-contact electrodes extending in the first direction and connected to the third wirings in first memory layers; and second via-contact electrodes extending in the first direction and connected to the fourth wirings in second memory layers.

Growing community of inventors

Ama Aichi, Japan

Kouji Matsuo