Rigaku Corporation

Kouji Kakefuda

Ichiro Tobita

Provided is an optical axis adjustment device for an X-ray analyzer comprising an incident-side arm, a receiving-side arm, an X-ray source, an incident-side slit, and an X-ray detector, wherein the device comprises a shielding strip disposed at a position blocking X-rays received by the X-ray detector from the X-ray source, and a shielding strip-moving device that rotates the shielding strip around the sample axis relative to the optical axis of X-rays reaching the X-ray detector from the X-ray source to two angle positions, and the amount of deviation in parallelism of the surface of a sample with respect to the optical axis of the X-rays is found on the basis of X-ray intensity values found by the X-ray detector for the two angle positions.

Optical axis adjustment device for X-ray analyzer

An optical axis adjustment method for an X-ray analyzer. In a 2&#x3b8;-adjustment step, a 0&#xb0; position of the rotation of a receiving-side arm and a 0&#xb0; position of the angle of diffraction 2&#x3b8; are aligned. In a Zs-axis adjustment step, the position of an incident-side slit along a direction orthogonal to the centerline of the X-rays incident upon a sample from an X-ray source is adjusted. In a &#x3b8;-adjustment step, the centerline of X-rays incident upon the sample from the X-ray source and the surface of the sample are adjusted so as to be parallel. In the 2&#x3b8;-adjustment step, the Zs-axis adjustment step, and the &#x3b8;-adjustment step, the capability for X-ray intensity positional resolution upon a straight line possessed by a one-dimensional X-ray detector is used to perform 2&#x3b8;-adjustment, Zs-axis adjustment, and &#x3b8;-adjustment.

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Akishima, Japan

Kouji Kakefuda