Rikagaku Kenkyusho

Ridagaku Kenkyusho

Kouichi Toyoda

Hiroshi Kumagai

Satoshi Wada

Hideo Tashiro

In order to provide a multilayer film structure for soft X-ray optical elements in which a high reflectivity can be attained in even a soft X-ray wavelength region of a wavelength of 10 nm or less including the wavelength range of water window zone, in a multilayer film structure for soft X-ray optical elements wherein a first thin film, being a different type of a second thin film, and the second thin film are piled up in layers to form a multi-layer film, at least one of the aforesaid first thin film and the aforesaid second thin film is made to be an oxide thin film.

Multilayer film structure for soft X-ray optical elements

The present invention has been achieved by perceiving the fact to the effect that a semiconductor production process-like manner such as CVD method or the like by which materials and film thickness can be controlled in an atomic scale may be utilized in case of preparing thin-film crystal, and employing such semiconductor production process-like manner being quite different from conventional technique. The invention relates to preparation of crystalline thin-films for solid-state lasers wherein a substrate contained in a vessel under a high vacuum condition is heated, materials for forming the laser material are supplied onto the surface of the aforesaid substrate in the form of gas, ion, single metal or metal compound to grow crystal on the surface of the aforesaid substrate, and a material of active ionic species is supplied onto the surface of the aforesaid substrate simultaneously with supply of the aforesaid materials for forming the laser host crystal, thereby controlling valence number of the material of active ionic species so as to be identical with the valence number of the metal ion constituting the crystal of the aforesaid laser host crystal.

Method and apparatus for preparing crystalline thin-films for

In order to eliminate a mechanically movable section, such as a rotation mechanism of a diffraction grating, to achieve a compact fabrication of the whole apparatus, and to realize stable action for selecting a wavelength, a laser oscillator selecting a wavelength in a wavelength-tunable laser is composed of a laser resonator consisting of a mirror on the input side and a mirror on the output side; a laser medium which is placed in the laser resonator and can oscillate in a predetermined range of wavelengths; a crystal to which is piezoelectric element is attached, the crystal receiving acoustic waves from the piezoelectric element in accordance with a desired wavelength; and a polarizing plate which is placed in the laser resonator and transmits only the output light beam having a prescribed plane of polarization or having a prescribed direction of light propagation among the output light beams from the laser medium. The apparatus thereby outputs only the desired wavelength.

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Kawagoe, Japan

Kouichi Toyoda