Hiwin Mikrosystem Corporation

Kou I Szu

Zong Ting Sie

Chen Yi Wang

In a quick measurement module provided by the present invention, a first distance sensing unit and a second distance sensing unit are provided individually on a movable seat, so that when the movable seat is displaced along a linear shifting axis, the first distance sensing unit senses the distance from the first reference plane, and meanwhile, the second distance sensing unit senses the distance from the second reference plane, so as to sense the linearity accuracy in movement of the movable seat with respect to the first reference plane and the second reference plane. The first reference plane and the second reference plane are spaced apart by an angle other than a right angle, so that the linearity accuracy in movement in the two different planes, such as the horizontal linearity accuracy and vertical linearity accuracy, of the movable seat can be obtained through sensing.

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Taichung, Taiwan

Kou I Szu