Nippon Light Metal Company, Ltd.

Mitsubishi Rayon Company, Limited

Mitsubishi Chemical Corporation

Tohoku University

Kanagawa Academy of Science and Technology

Kota Shirai

Tadahiro Ohmi

Yoshihiko Moriyama

Eiko Okamoto

Hideki Masuda

Hiroaki Kita

Hisakazu Ito

Masafumi Kitano

Yoshihiro Uozu

Seiji Tone

Katsuhiro Kojima

Hiroshi Onomoto

Shinichiro Sumi

Minoru Tahara

Hiroshi Okada

Takashi Yanagishita

Masayuki Saeki

Kazume Mochizuki

Tetsuya Ijiri

A prototype aluminum mold for stampers that is used to manufacture stampers having a fine irregular surface structure on the surface thereof and containing aluminum and magnesium, wherein the content of magnesium is 0.1% by mass to 3% by mass, the content of silicon is 100 ppm by mass or less, the total content of elements other than aluminum and magnesium is 500 ppm by mass or less, and the number of magnesium silicide particles having an equivalent diameter of 10 nm or more on the surface of the prototype aluminum mold for stampers is 10/1000 &#x3bc;mor less.

Prototype aluminum mold for stampers and method for manufacturing same, stamper and method for manufacturing same, method for manufacturing article, and antireflection article

The invention relates to a stamper in which an oxide film having a fine concave-convex structure made up of a plurality of fine pores having an aspect ratio represented by [the depth of the fine pores/the average interval between the fine pores] of 1 to 4 is formed on the surface of an aluminum base material which is made of aluminum having a content of Ti of 150 ppm to 500 ppm, a content of B or C of 1 ppm to 50 ppm and a purity of 99.9% or more. According to the invention, it is possible to provide a low-cost stamper in which the emergence of a pattern derived from the traces of crystal grains on the surface of the oxide film is suppressed, an article having a favorable appearance, which is manufactured using the above stamper, and a method for manufacturing the above.

Stamper, article and method for manufacturing the same

The present invention relates to an aluminum die base material for a stamper having a component composition that contains 0.5% by weight to 3.0% by weight of Mg, the total amount of elements other than Mg, including unavoidable impurities, is 500 ppm or less, and the remainder is composed of Al, and a forged structure in which the average crystal grain size is 1000 &#x3bc;m or less and the surface area ratio of second phase particles is 0.10% or less. According to the present application, a stamper can be provided in which, together with the crystal grain size of the aluminum being refined, the formation of second phase particles is inhibited, surface irregularities attributable to mirrored surface polishing are reduced, and a uniform relief pattern is formed by anodic oxidation treatment.

Aluminum base die material for stamper, aluminum base die for stamper and stamper

Provided is an Al alloy member with an excellent mechanical strength that is sufficient for use in large-scale manufacturing apparatuses. The Al alloy member is characterized in that, in mass %, Mg concentration is 5.0% or less, Ce concentration is 15% or less, Zr concentration is 0.15% or less, the balance comprises Al and unavoidable impurities, the elements of the unavoidable impurities are respectively 0.01% or less, and the Vickers hardness of the Al alloy member is greater than 30.

Al alloy member, electronic device manufacturing apparatus, and method of manufacturing an anodic oxide film coated al alloy member

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Shizuoka, Japan

Kota Shirai