Fuji Electric Co., Ltd.

Kota Ohi

Yuichi Onozawa

Yoshihiro Ikura

Hiroyuki Tanaka

Kazutoshi Sugimura

Tatsuya Naito

Mutsumi Kitamura

Yosuke Sakurai

Misaki Takahashi

Toru Ajiki

Yoshiharu Kato

Eri Ogawa

A device includes a substrate, a drift region in the substrate, a base region above the drift region; a first high concentration region selectively formed in a part on a surface side of the base region and having a concentration higher than the drift region; a trench portion formed in a front surface of the substrate and including extending portions; and mesa portions between the extending portions. The mesa portions includes first mesa portions having the first high concentration region and second mesa portions not having the first high concentration region, the trench portion includes a first trench portion having an first conductive portion (a gate conductive portion) and adjacent to the first mesa portion, a second trench portion having the first conductive portion and adjacent to the second mesa portion, and a third trench portion having an second conductive portion and adjacent to the first or second mesa portion.

Semiconductor device comprising insulated-gate bipolar transistor

Provided is a semiconductor device, including: a drift region of a first conductivity type which is provided in a semiconductor substrate, and a buffer region of the first conductivity type which is provided between the drift region and a lower surface of the semiconductor substrate, and has three or more concentration peaks higher than a doping concentration of the drift region of the semiconductor substrate in a depth direction. Three or more of the concentration peaks includes a shallowest peak closest to the lower surface of the semiconductor substrate, a high concentration peak arranged at an upper side than the lower surface of the semiconductor substrate than the shallowest peak, and one or more low concentration peaks arranged at an upper side than the lower surface of the semiconductor substrate than the high concentration peak and of which the doping concentration is ⅕ or less of the high concentration peak.

Semiconductor device

A semiconductor device is provided that has a semiconductor substrate, a drift layer of a first conductivity type formed in the semiconductor substrate, a base region of a second conductivity type formed in the semiconductor substrate and above the drift layer, and an accumulation region of the first conductivity type provided between the drift layer and the base region and having an impurity concentration higher than an impurity concentration in the drift layer, wherein the accumulation region has a first accumulation region and a second accumulation region that is formed more shallowly than the first accumulation region is and on a side of a boundary with a region that is different from the accumulation region in a planar view.

A semiconductor device is provided comprising: a semiconductor substrate; a drift region having a first conductivity type formed in the semiconductor substrate; a collector region having a second conductivity type, in the semiconductor substrate, formed between the lower surface of the semiconductor substrate and the drift region; and a high concentration region having a first conductivity type, in the semiconductor substrate, formed between the drift region and the collector region and having higher doping concentration than that in the drift region, wherein a doping concentration distribution of the high concentration region in the depth direction of the semiconductor substrate comprises one or more peaks, wherein a distance between a first peak closest to the lower surface side of the semiconductor substrate among the peaks of the doping concentration distribution of the high concentration region and the lower surface of the semiconductor substrate is 3 &#x3bc;m or less.

Semiconductor device having an emitter region and a contact region inside a mesa portion

The position of the side wall of a metal electrode is precisely controlled and the coverage of a layer above the metal electrode is improved. A semiconductor device is provided, including: a semiconductor substrate; and a metal electrode formed above an upper surface of the semiconductor substrate, wherein a side wall of the metal electrode includes a lower portion contacting the semiconductor substrate, and an upper portion that is formed upper than the lower portion and has a smaller inclination relative to the upper surface of the semiconductor substrate than the lower portion. An active region formed in the semiconductor substrate is further included, and the metal electrode may be a field plate formed on an outer side relative to the active region on the upper surface of the semiconductor substrate. The upper portion of the side wall of the field plate may have an upward-convex shape.

Semiconductor device and fabrication method

Provided is a semiconductor device comprising: a semiconductor substrate; a plurality of first trench portions formed at a front surface side of the semiconductor substrate and extending in a predetermined extending direction in a planar view; an emitter region of a first conductivity type formed between adjacent trenches of the plurality of first trench portions at the front surface side of the semiconductor substrate; a first contact region of a second conductivity type formed between the adjacent trenches of the plurality of first trench portions, the first contact region and the emitter region being arranged alternately in the extending direction; and a second contact region of a second conductivity type formed above the first contact region to be apart from the emitter region and having a higher doping concentration than the first contact region.

Provided is a guard ring section to which a fine processing is easily applied. Provided is a semiconductor device comprising: a semiconductor substrate; an active region formed in the semiconductor substrate; and a guard ring section formed more outside than the active region in the semiconductor substrate, wherein the guard ring section includes: a guard ring formed in a circular pattern on an upper surface of the semiconductor substrate; an interlayer insulating film formed above the guard ring; a field plate formed in a circular pattern along the guard ring and above the interlayer insulating film; and a tungsten plug formed in a circular pattern along the guard ring and penetrating the interlayer insulating film to connect the guard ring and the field plate.

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Matsumoto, Japan

Kota Ohi