Shimadzu Corporation

Kota Nagasao

Manabu Ueda

Takahisa Araki

A driving part of an analysis device includes a cylindrical part on one surface of which a moving mirror is fixed, and a VCM connected at another surface of the cylindrical part and reciprocating the cylindrical part. The VCM includes: a yoke in a cylindrical shape; magnets provided at two ends of the yoke; a fixing part which is in a cylindrical shape enclosing the yoke and fixes, at a bottom surface, the yoke provided with the magnets; a lid part provided with windows and covering an opening surface of the fixing part; a moving part which is arranged between the yoke and the fixing part and on which a coil in a cylindrical shape is fixed; and support parts each including one end fixed to the moving part and another end connected at the another surface of the cylindrical part through the window.

Analysis device

Four rod electrodes (to) for separating ions according to a mass-to-charge ratio are held by a rod holder (). The rod holder () is placed on a metal holder sustaining stand () provided on a bottom surface of a vacuum housing (), and is fixed while being pressed by a fixation band () fixed to the holder sustaining stand () with screws (). The fixation band () has a coating film layer () formed by a black nickel plating process on the entire surface of a main member () made from phosphor bronze. The coating film layer () has high emissivity, and thus heat transferred from the rod holder () to the fixation band () is efficiently radiated into the vacuum housing (). Therefore, heat generated in the rod holder () due to dielectric loss is efficiently dissipated, and deformation of the rod holder can be reduced.

Mass spectrometer

Four rod electrodes (to) for separating ions according to a mass-to-charge ratio are held by a rod holder (). The rod holder () is placed on a metal holder sustaining stand () provided on a bottom surface of a vacuum housing (), and is fixed while being pressed by a fixation band () fixed to the holder sustaining stand () with screws (). The fixation band () is made from phosphor bronze having higher thermal conductivity than thermal conductivity of stainless steel or the like. Therefore, heat generated in the rod holder () due to dielectric loss is not only directly transmitted to the holder sustaining stand (), but also efficiently transmitted to the holder sustaining stand () through the fixation band (). With this, the heat of the rod holder () is efficiently dissipated, and non-uniformity of temperature of the rod holder can be reduced.

Mass spectrometer including a fixation band

Four rod electrodes (to) for separating ions according to a mass-to-charge ratio are held by a rod holder (). The rod holder () is placed on a metal holder sustaining stand () provided on a bottom surface of a vacuum housing (), and is fixed while being pressed by a fixation band () fixed to the holder sustaining stand () with screws (). A heat release layer () made from heat dissipation silicone or the like is inserted between the fixation band () and the rod holder () and between the fixation band () and the holder sustaining stand (). Therefore, heat generated in the rod holder () due to dielectric loss is not only directly transmitted to the holder sustaining stand (), but also efficiently transmitted to the holder sustaining stand () through the fixation band ().

Four rod electrodes (to) for separating ions according to a mass-to-charge ratio are held by two rod holders (). The rod holders () are attached to metal holder sustaining stands () provided on a bottom surface of a vacuum housing (). A coating film layer () is formed by a black nickel plating process on parts of wall surfaces in the vacuum housing (), an inlet lens (), and an outlet lens (), the parts facing a quadrupole mass filter unit (). The emissivity of the coating film layer () is higher than that of Al or the like, and thus radiant heat from the quadrupole mass filter unit () is efficiently absorbed by the coating film layer (). Therefore, heat generated in the rod holders () due to dielectric loss is efficiently dissipated, and deformation of the rod holders can be reduced.

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Kyoto, Japan

Kota Nagasao