Disco Corporation

Kota Fukaya

Zhiwen Chen

Chae Yong

A wafer is divided along a plurality of division lines by applying a laser beam of such a wavelength as to be transmitted through the wafer, to form division start point modified layers along the division lines; and applying an external force to the wafer, to divide the wafer along the division lines, with the division start point modified layers as start points of division. Prior to forming the division start point modified layers on the back surface side of the wafer, the laser beam is applied at an output of not more than a first output, to form crack guide layers for guiding a crack extension direction as modified layers in the vicinity of the back surface. Thereafter the division start point modified layers are formed at positions equivalent to the positions of the crack guide layers.

Wafer processing method

An optical device including a substrate and a light emitting layer formed on the front surface of the substrate. Both the front surface and the back surface of the substrate are parallel to each other and have substantially the same rectangular shape. The substrate has four side surfaces connecting the front surface and the back surface of the substrate. Of the four side surfaces, each of the two side surfaces adjacent to each other has a convex sectional shape between the front surface and the back surface of the substrate, and each of the other two side surfaces adjacent to each other has a concave sectional shape between the front surface and the back surface of the substrate.

Optical device and manufacturing method therefor

An optical device including a substrate formed of a light transmitting material and a light emitting layer formed on the front surface of the substrate. Both the front surface and the back surface of the substrate are parallel to each other and have substantially the same rectangular shape. The substrate has four side surfaces connecting the front surface and the back surface of the substrate. Each side surface of the substrate has a corrugated sectional shape such that a plurality of concave portions and convex portions are alternately formed.

Growing community of inventors

Tokyo, Japan

Kota Fukaya