Nuflare Technology, Inc.

Kota Fujiwara

Michihiro Kawaguchi

Kazuhiro Shiba

Yoshiro Yamanaka

A temperature measuring mask includes: a substrate; a temperature sensorbeing provided to the substrate, and being capable of sensing a temperature inside a charged particle beam lithography device; a circuit boardbeing provided to the substrate, and including a measuring circuitA that measures the temperature using the temperature sensorand a storage deviceB that stores measurement data of the measured temperature; a secondary cellbeing provided to the substrate, and supplying electric power to the circuitA; and a photoelectric cellbeing provided to the substrate, and generating electric power by being irradiated with an energy beam to charge the secondary cell

Temperature measuring mask and temperature measuring method

One aspect of the invention provides a substrate position detecting method for charged particle beam photolithography apparatus in order to be able to measure accurately and simply a substrate position on a stage. The substrate position detecting method for charged particle beam photolithography apparatus includes placing a substrate on a stage that can be moved in an X-direction and a Y-direction; measuring a position in the X-direction of the stage while moving the stage in the X-direction, and illuminating obliquely an upper surface of the substrate with a laser beam to receive light reflected from the substrate with a position sensing device; computing a barycentric position of the reflected light when the stage is moved in the X-direction; measuring a position in the Y-direction of the stage while moving the stage in the Y-direction, and illuminating obliquely the upper surface of the substrate with the laser beam to receive light reflected from the substrate with the position sensing device; computing a barycentric position of the reflected light when the stage is moved in the Y-direction; and computing the positions of the substrate from the position measurement results of the stage and the computed barycentric position.

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Kamakura, Japan

Kota Fujiwara