Sumitomo Osaka Cement Co., Ltd.

Kosuke Okahashi

Masayuki Motoya

Norikazu Miyazaki

Shingo Takano

Yu Kataoka

Shotaro Hirata

Provided is an optical waveguide device in which both signal electrode collapse and signal electrode peeling/damage can be prevented. An optical waveguide device in which an optical waveguide is formed on a substrate and a control electrode for controlling a light wave propagating through the optical waveguide is disposed on the substrate, is characterized in that, the control electrode includes a signal electrode, and the signal electrode has a narrow portion, where a width of the signal electrode on a substrate side is narrow, and a wide portion, where a width of the signal electrode on an upper portion side of the signal electrode is wide, a prevention film that is disposed in contact with the narrow portion of the signal electrode and that prevents the signal electrode from collapsing, is provided on the substrate, and at a position of the signal electrode where the narrow portion and the wide portion are connected, a surface of the prevention film is formed as a curved surface protruding toward the signal electrode, and a side surface of the signal electrode is formed along the curved surface.

Optical waveguide element, and optical modulation device and optical transmission device using same

There is provided an optical waveguide device including a substrate, an optical waveguide formed on the substrate, and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, and a first conductive layer on the first base layer, and a conductor pattern including a second base layer made of a second material different from the first material and a second conductive layer on the second base layer is formed in a region other than a path from an input end to an output end of the optical waveguide, in a region on the substrate.

Optical waveguide device, optical modulator, optical modulation module, and optical transmission apparatus

An optical waveguide device includes a substrate, an optical waveguide formed on the substrate, two electrodes disposed at positions sandwiching the optical waveguide from both sides in a plane of the substrate; and a dielectric layer covering a top of the optical waveguide, wherein the dielectric layer extends in a width direction of the optical waveguide to an extent including edges of the two electrodes, facing the optical waveguide, and is disposed to partially cover each of the two electrodes.

In order to provides an optical waveguide element and an optical modulator that can prevent the damage to the substrate and the deterioration of the properties of the substrate that may occur due to the stress, by reducing the influence of stress on the substrate by the buffer layer, the optical waveguideis provided with a substratehaving an electro-optical effect; an optical waveguideformed on the substrate; a first buffer layerprovided on the substrate; and a second buffer layerprovided under the substrate, wherein the first buffer layerand the second buffer layerare composed of substantially the same material and have substantially the same thickness, and the first buffer layerand the second buffer layerare formed to be in contact with an upper surface and lower surface of the substrate, respectively.

Optical waveguide element and optical modulator

To provide an optical modulator in which a plurality of Mach-Zehnder type optical waveguides are integrated, which can be driven at a low voltage, and in which the occurrence of a crosstalk phenomenon is suppressed. Provided is an optical modulator including a substratehaving an electro-optic effect, and an optical waveguideand a control electrode that are formed on the substrate, in which the optical waveguide has a structure in which a plurality of Mach-Zehnder type optical waveguides are disposed in parallel, the control electrode has a GSSG type differential electrode structure in which two signal electrodes S are disposed between two ground electrodes G for one of the Mach-Zehnder type optical waveguides, and a crosstalk suppressing unit that suppresses signal crosstalk is provided in the ground electrode sandwiched between adjacent Mach-Zehnder type optical waveguides, so that optical modulator can be driven at a low voltage, and in which the occurrence of a crosstalk phenomenon is suppressed.

Optical modulator

In order to provide an optical modulator capable of preventing damage to the substrate and preventing deterioration of the properties of the modulator by reducing the stress on the substrate generated by the modulation electrode, there is provided an optical modulator, including: a substratehaving an electro-optic effect; an optical waveguideformed on the substrate; and a modulation electrode (signal electrode S and ground electrode G) provided on the substrateand modulating a light wave propagating in the optical waveguide, wherein a resinto reduce the stress on the substrategenerated by the modulation electrode is arranged between a part of the bottom surface of the modulation electrode and the substratefacing a part of the bottom surface of the modulation electrode.

There is provided an optical waveguide device including: a substrate; an optical waveguide formed on the substrate; and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, a first conductive layer on the first base layer, a second base layer made of a second material different from the first material, which is on the first conductive layer, and a second conductive layer on the second base layer, and an edge of the second base layer is covered with the second conductive layer, in a cross-section perpendicular to an extending direction of the optical waveguide.

Optical waveguide device, manufacturing method of optical modulation element, optical modulator, optical modulation module, and optical transmission apparatus

Provided is an optical modulator that can be driven at lower voltage through the use of differential signal output. An optical modulator includes a substrateand optical waveguides () and a control electrode that are formed on the substrate, in which the optical waveguide includes Mach-Zehnder type optical waveguide, the control electrode is provided with two ground electrodes sandwiching three signal electrodes; the three signal electrodes are constituted by second and third signal electrodes that sandwich a first signal electrode, and have a wiring structure in which one modulation signal of the differential signal is applied to the first signal electrode, and the other modulation signal of the differential signal is applied to the second and third signal electrodes; and one branched waveguide () out of two Mach-Zehnder type optical waveguides is disposed between the first and second signal electrodes, and the other branched waveguide () is disposed between the first and third signal electrodes.

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Tokyo, Japan

Kosuke Okahashi