Daihen Corporation

National Institute of Technology

Kosuke Maeda

Shuji Omae

Ryohei Tanaka

Hideo Ito

Mitsuo Ebisawa

Masayuki Nakahama

Shinichi Negi

Manabu Ishitobi

An example inductor comprises multiple coil parts and each formed by flatwise-winding layers of turns of a flat wire arranged in a radial direction with gaps between each of the layers, and the multiple coil parts are arranged in an axial direction with a clearance. There is provided a clearance between the multiple coil parts, through which air flows, achieving improvement in heat dissipation.

Inductor, device equipped with inductor and method for manufacturing inductor

A high frequency device for supplying a high frequency power to a load, the high frequency device includes: an oscillating unit that can vary an oscillation frequency; a high frequency power supplying unit that serves as a power source by amplifying an oscillation signal output from the oscillating unit for supplying the high frequency power to the load; a reflected-wave information calculating unit that calculates reflected wave information on a reflected wave power, and outputs the reflected wave information; a frequency control unit that controls the oscillation frequency of the oscillating unit so as to lower the reflected wave information; an impedance adjusting unit that is disposed at a downstream of the high frequency power supplying unit in a power supplying direction, and that has at least one variable reactance element which can be controlled; and an element control unit that controls the variable reactance element of the impedance adjusting unit so as to lower the reflected wave information.

High frequency device with variable frequency and variable load impedance matching

An impedance matching apparatus has: a storing portionfor previously storing, for plural positions which can be taken by a movable portion of a variable impedance element, allowable power values respectively corresponding to the plural positions of the movable portion; and an abnormality determining portionfor determining an allowable power value based on the present positions of the movable portion supplied from position detecting portionsand the allowable power values stored in the storing portion, for comparing the allowable power value with an input power value, and for determining that it is abnormal when the input power value is larger than the allowable power value. Accordingly, the calculation load during the matching operation can be reduced.

Impedance matching apparatus

Growing community of inventors

Osaka, Japan

Kosuke Maeda