Rigaku Corporation

Kosuke Kawakyu

Yoshiyuki Kataoka

Hisashi Inoue

An X-ray fluorescence analysis method according to an FP method uses a predefined theoretical intensity formula in a standard sample theoretical intensity calculation step for obtaining a sensitivity constant and in an unknown sample theoretical intensity calculation step during iterative calculation. In the formula, only in an absorption term relating to absorption of X-rays, a mass fraction of each component is normalized so that a sum of the mass fractions of all components becomes 1.

X-ray fluorescence analysis method, X-ray fluorescence analysis program, and X-ray fluorescence spectrometer

In the wavelength dispersive X-ray fluorescence spectrometer of the present invention, a counting loss correcting unit (), when correcting a counting rate of pulses determined by a counting unit () on the basis of a dead time of a detector (), stores beforehand a correlation between a predetermined pulse height range, within which pulses are selected by a pulse height analyzer (), and the dead time and determines the dead time so as to correspond to the predetermined pulse height range during a measurement on the basis of the stored correlation.

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Takatsuki, Japan

Kosuke Kawakyu