Forschungszentrum Karlsruhe Gmbh

Karlsruher Institut Fur Technologie

Konrad Sell

Sven Ulrich

Michael Stüber

Jian Ye

Harald Leiste

Lorenz Niederberger

Martina Lattemann

Roland Loos

In a method of producing a layered composite, wherein at least one layer including cubic boron nitride is deposited on a substrate and, during the deposition, 3 to 15 at % oxygen is added for assuming the nitrogen locations of the cubic boron-nitride grating or intermediate grating locations, thereby providing for cubic boron nitride layers with a thickness of at least 2 &#x3bc;m without the formation of cracks.

Method of producing a layered composite including cubic boron nitride

In a layered composite including a substrate comprising a number of individual layers disposed on the substrate, at least one of the individual layers includes cubic boron nitride formed by material deposition, the cubic boron nitride including oxygen added during deposition of the material.

Layered composite including cubic boron nitride

In an arrangement for generating a local electron-cyclotron-microwave-low pressure plasma at a certain location within a gas-filled process chamber, a microwave supply means providing a microwave beam and a plasma localization unit generating a magnetic field are provided such that the magnetic field and the microwave beam intersect each other in the process chamber. The microwaves are uncoupled onto a concave reflection structure from the focal point thereof so that the microwave beam generated is essentially parallel. An arrangement for generating a magnetic field is movable along the microwave beam axis so that a cross volume between the microwave beam and the magnetic field can be moved along the beam axis whereby the conditions for electron cyclotron resonance are adjustable by displacement of the magnetic field.

System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber

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Karlsruhe, Germany

Konrad Sell