Trumpf Huettinger Sp. Z O. O.

Konrad Lewandowski

Andrzej Klimczak

Marcin Golan

A power converter configured to generate a high-frequency power signal comprises at least one amplifier stage having first and second amplifier paths each having an amplifier, the first amplifier path outputting a first amplifier path output signal and the second amplifier path outputting a second amplifier path output signal that, has a phase shift relative to the first amplifier path output signal greater than 0&#xb0; and less than 180&#xb0;. The first and second amplifier paths are connected to a phase-shifting coupler that is configured to couple the first and second amplifier path output signals to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths comprises a SiC MOSFET.

Power converter, power supply system and HF plasma system

An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.

Growing community of inventors

Kobylka, Poland

Konrad Lewandowski