Atotech Deutschland Gmbh

Konrad Cramer

Heinrich Meyer

Olaf Kurtz

Andreas Thies

Ralph Herber

Peter Prechtl

Sven Theisen

The invention relates to a microstructure coolerfor an articleto be cooled, whereby the coolerincludes a stack of at least two metal filmsand one base platethat can be brought via a thermal contact surfaceinto thermal contact with the article, the metal filmsand the base plateare joined to one another in a material fit, present in the metal filmsare channelsfor cooling medium, and the channelshave a width in the range of 100 to 2,000 &#x3bc;m, a depth in the range of 25 to 1,000 &#x3bc;m, and a mean interval in the range of 50 to 1,000, residual film thicknesses resulting from the channelsin the metal filmsare in the range of 50 to 300 &#x3bc;m, and the base platehas a thickness in the range of 200 to 2,000 &#x3bc;m.

Microstructure cooler and use thereof

Micro-components having at least one individual layer are produced according to the method, which have functional layers on the walls of inner structures, for example of flow channels. The micro-components are intended to be suitable for a large number of different applications in chemical reaction technology, for heat exchanging, for mixing substances or for evaporating liquids. In particular, the micro-components are intended to have no problems in respect of leaks in the flow channels. The method has the following method steps: A. producing the at least one individual layer by: a. producing a first metal layer or a metal foil ; b. forming the inner structures in and/or on the first metal layer or metal foil by suitable etching methods and/or metal deposition methods; and c. forming the functional layers solely on the walls of the inner structures and thereafter B. stacking up and joining the one individual layer to a segment terminating the inner structures, or a plurality of individual layers to one another and to the terminating segment.

Method for producing microcomponents

Growing community of inventors

Berlin, Germany

Konrad Cramer