Beijing Voyager Technology Co., Ltd.

Kong Yin Ho

Youmin Wang

Yufeng Wang

Gary Li

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a skeleton on a back surface of the MEMS scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis, and the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.

Two-axis scanning mirror using piezoelectric drivers and serpentine torsion springs

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of looped torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of looped torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a first axis. The second pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a second axis orthogonal to the first axis.

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Mountain View, CA, United States of America

Kong Yin Ho