Taiwan Semiconductor Manufacturing Comp. Ltd.

Kong-Hsin Teng

Mu-Tsang Lin

Tien-Wen Wang

Jen-Hom Chen

A temperature-sensing wafer position detection system and method which uses temperature to determine whether a wafer is properly positioned on a bake plate prior to commencement of a photolithography baking process, for example. The system includes a bake plate and a temperature-sensing apparatus which engages the bake plate and measures the change in temperature (&#x394;T) of the bake plate over a specified time interval to determine whether the wafer is properly or improperly positioned on the support. In the event that the &#x394;T of the bake plate is at least as great as a given temperature change threshold value over a specified time interval, this indicates that the wafer is properly positioned for processing.

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Beipu, Taiwan

Kong-Hsin Teng