Yokogawa Electric Corporation

Koki Iemura

Yasuyuki Suzuki

Shinji Iio

Morio Wada

Yoshihiro Sanpei

Mamoru Hihara

An interferometer of the invention includes: a first splitting element which includes a first transparent medium and a first splitting film formed on the first transparent medium, and which splits incident light into a first split beam and a second split beam, the first split beam being the incident light reflected by the first splitting element and the second split beam being the incident light transmitted through the first splitting element; and a second splitting element which includes a second transparent medium and a second splitting film formed on the second transparent medium, and which causes interference between the first split beam and the second split beam passed through different optical paths, the second splitting element being positioned such that a positional relationship between the second transparent medium and the second splitting film with respect to a direction of incidence on the second splitting element of the first split beam is opposite to a positional relationship between the first transparent medium and the first splitting film with respect to a direction of incidence of the incident light on the first splitting element.

Interferometer, demodulator, and splitting element

An optical phase shifting plate includes: an optical substrate configured to change a refractive index for light which passes through the optical substrate by a thermooptical effect; a thin-film heater formed on a surface of the optical substrate; a wiring member disposed to be substantially perpendicular to the surface of the optical substrate; an intermediate member disposed between the optical substrate and the wiring member, the intermediate member having: a first surface that is substantially flush with a surface of the thin-film heater; and a second surface that is substantially flush with a surface of the wiring member and that is perpendicularly adjacent to the first surface, a first bonding wire which electrically connects the surface of the thin-film heater to the first surface of the intermediate member; and a second bonding wire which electrically connects the surface of wiring member to the second surface of the intermediate member.

Growing community of inventors

Tokyo, Japan

Koki Iemura