Horiba, Ltd.

Koji Ueda

Kazuhiro Miyamura

Hiromi Ohkawa

Hiroki Tanabe

Akio Maeno

Hisashi Yamanouchi

Yuri Aono

A measuring electrode for chemical liquid in semiconductor process that measures a chemical liquid used for a semiconductor process comprises a first body having a first internal liquid chamber into which a first internal liquid is filled, and a flow tube for a part or all of which a responsive glass is used and that forms a flow channel where a chemical liquid as being a measuring object flows, wherein the flow tube is so arranged to penetrate the first body and the responsive glass makes contact with the first internal liquid in the first internal liquid chamber.

Measuring electrode and measuring system for chemical liquid

The electrode assembly is provided with: a rod-like bodythat extends along a predetermined axis; a substrate that is formed with a through-hole penetrating between a front surface and a back surface and attached to a fore end part of the body; and a sensor chip for electrochemical measurement, which is attached on the back surface of the substrate such that a sensing part is exposed outside from the through-hole, wherein: on the back surface of the substrate, a wiring for obtaining an output signal from the ISFET chip is formed, and the sensor chip is attached to the wiring directly or closely; and the substrate is attached with being inclined with respect to the predetermined axis of the body, and thereby the front surface of the substrate forms at least a part of a fore end surface that is inclined with respect to the predetermined axis.

Electrode assembly

PH electrode

Growing community of inventors

Kyoto, Japan

Koji Ueda