Dainippon Screen Mfg. Co., Ltd.

Koji Uchitani

Masahiro Mimasaka

Minobu Matsunaga

Akiko Tanaka

The present invention provides a developing apparatus and a developing method which make it possible to uniformly develop a photosensitive film which is formed on a substrate at a high throughput. A substrate processing apparatus which comprises such a developing apparatus and a developing method is also realized. During developing processing, a substrate is held still by a substrate holding portion. A developing solution dispensing nozzle moves over the substrate, linearly from a position off and on one side of the substrate to a position off and on the other side of the substrate in a scanning direction (A), and supplies a developing solution onto the substrate. After the developing solution dispensing nozzle moves in the scanning direction (A), a substrate transport apparatus replaces the substrate which is held by the substrate holding portion with another substrate. Following this, the developing solution dispensing nozzle moves over the substrate, linearly from the position off and on the other side of the substrate to the position off and on the one side of the substrate in an opposite scanning direction (D) to the scanning direction (A), and supplies the developing solution onto the substrate.

Developing apparatus, developing method and substrate processing

A developing apparatus in which a substrate holding part holds a substrate in a stationary state, and a developer discharge nozzle starts scanning from a scanning start position. After scanning starts, the developer discharge nozzle discharges a developer at a discharge start position before a slit discharge port thereof reaches the substrate. The developer discharge nozzle moves linearly on the substrate in a scanning direction while discharging the developer, passes over the substrate, and thereafter stops discharging the developer at a discharge stop position separated from the substrate. The developer discharge nozzle stops scanning when reaching a scanning stop position.

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Kyoto, Japan

Koji Uchitani