Seiko Epson Corporation

Koji Ohashi

Chikara Kojima

Hironori Suzuki

Takeshi Kijima

Setsuya Iwashita

Yasuaki Hamada

Hiroshi Matsuda

Eiji Natori

Eiji Osawa

Kanechika Kiyose

Shuichi Tanaka

Katsuhiro Imai

Takahiro Kamijo

Tomohiro Sayama

Yasuyuki Matsumoto

Eiju Hirai

Junichi Karasawa

Takamitsu Higuchi

Masao Nakayama

Tomohide Onogi

Makoto Furuhata

Kazuya Kitada

Hikaru Iwai

Yoshinao Miyata

Shiro Yazaki

Yasuhiro Itayama

Noboru Furuya

Motohisa Noguchi

Seiji Izuo

Kenichi Kurokawa

Takumi Yamaoka

Yoshiki Yano

Yashuhiro Itayama

A piezoelectric element includes: a first electrode formed at a vibration plate; a seed layer formed at the first electrode; a piezoelectric film containing potassium, sodium, and niobium and formed at the seed layer; and a second electrode formed at the piezoelectric film. The piezoelectric film contains lithium and one or more first transition elements. The seed layer contains bismuth. When the piezoelectric film is divided into two equal parts in a stacking direction, the second electrode side is defined as a first region, and the first electrode side is defined as a second region, a bismuth intensity obtained by SIMS measurement at a boundary between the first region and the second region is equal to or less than 1/500 of a maximum bismuth intensity obtained by the SIMS measurement of the piezoelectric film.

Piezoelectric element, droplet dispensing head, actuator, and vibrator

A piezoelectric element according to the present disclosure includes: a first electrode; a piezoelectric layer formed at an upper part of the first electrode; and a second electrode formed at an upper part of the piezoelectric layer, in which the piezoelectric layer contains potassium, sodium, and niobium, and a Young's modulus of the piezoelectric layer measured by a nanoindentation method exceeds 130 GPa.

Piezoelectric element, head chip, liquid ejection device, and sensor

A mounting structure includes: a first substrate that has a first surface on which a functional element is provided; a wiring portion that is provided at a position, which is different from a position of the functional element on the first surface, and is conductively connected to the functional element; a second substrate that has a second surface that is opposite to the first surface; and a conduction portion that is provided on the second surface, is connected to the wiring portion, and is conductively connected the functional element. The shortest distance between the functional element and the second substrate is longer than the longest distance between the second substrate and a position where the wiring portion is connected to the conduction portion.

Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus

A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.

Piezoelectric device having plurality of vibrating regions and electronic apparatus

A piezoelectric actuator includes a vibrating plate including a first surface that closes an opening provided in a substrate and a second surface in which a plurality of piezoelectric elements is provided, a suppression part configured to suppress a vibration of the vibrating plate, and a first wall and a second wall protruding from the first surface to the opening. When a portion where the first electrode, the piezoelectric layer and the second electrode overlap each other is an active part of the piezoelectric element, the first wall and the second wall are provided to sandwich the active part in plan view from the stacking direction of the first electrode, the piezoelectric layer and the second electrode, and the second wall is different from the first wall at least in one of the width, height, length and physical property.

Piezoelectric actuator, ultrasound element, ultrasound probe, ultrasound device, and electronic device

An ultrasonic device includes a base material that has an opening, a vibration plate that is provided on the base material and closes the opening, and a piezoelectric element that is provided on the vibration plate, in which the vibration plate has a first layer provided on the base material, and a second layer that is disposed between the first layer and the piezoelectric element and that suppresses diffusion of a component contained in the piezoelectric element, and a bending rigidity of the second layer is equal to or larger than a bending rigidity of the first layer.

Ultrasonic device and ultrasonic apparatus

Provided is an ultrasonic device including a substrate and a vibration plate provided on the substrate and having one or more vibrators configured to generate an ultrasonic wave by vibration. The vibration plate has a movable portion provided with the vibrator and configured to vibrate accompanying with the vibration of the vibrator, and a fixed portion fixed to the substrate. A vibration frequency of a reflected wave based on a wave transmitted from the movable portion and received by the movable portion is outside a vibration frequency band region of the vibrator.

Ultrasonic device and ultrasonic sensor

A piezoelectric element includes a first electrode layer, a piezoelectric layer, and a second electrode layer. The first electrode layer, the piezoelectric layer, and the second electrode layer are stacked in sequence on one another. The first electrode layer has a first part overlapping the piezoelectric layer in a plan view, and a second part at least partially separated from the first part and not overlapping the piezoelectric layer in the plan view. The second electrode layer has a third part overlapping the piezoelectric layer in the plan view, and a fourth part separated from the third part. The fourth part is in contact with the first part and the second part.

Piezoelectric element, piezoelectric actuator, ultrasonic probe, ultrasonic apparatus, electronic apparatus, liquid jet head, and liquid jet apparatus

A piezoelectric actuator includes: a vibrating plate including a first surface configured to close an opening provided in a substrate and also including a second surface including a plurality of piezoelectric elements; a suppressing portion configured to suppress vibration of the vibrating plate; and a plurality of walls sticking out into the opening from the first surface, in which, when an active portion of a piezoelectric element is set as a portion where a first electrode, a piezoelectric layer, and a second electrode overlap, the walls are provided between adjacent active portions in plan view from a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked, and a distance between adjacent walls is longer than a distance between adjacent active portions in a plane perpendicular to the stacking direction.

Piezoelectric actuator, ultrasonic element, ultrasonic probe, ultrasonic device, and electronic device

An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.

MEMs device and electronic device

An ultrasonic device according to an aspect of the present disclosure includes a substrate in which an opening section piercing through the substrate in a thickness direction is provided, a vibration plate provided on the substrate to close the opening section, a piezoelectric element provided in a position corresponding to the opening section on a first surface at the opposite side of the substrate side of the vibration plate, and an elastic layer provided in contact with a second surface at the substrate side of the vibration plate at the inner side of the opening section of the substrate. The elastic layer includes a curved surface recessed to the vibration plate side at the opposite side of the vibration plate side.

A piezoelectric film includes a substrate having flexibility, and at least two piezoelectric elements provided to the substrate so as to be arranged at intervals of a first dimension along a first direction, the piezoelectric elements are each configured by stacking a first electrode film, a piezoelectric film made of an inorganic material, and a second electrode film along a thickness direction of the substrate, and an area between the piezoelectric elements adjacent to each other along the first direction forms a vibrational region which can be displaced in the thickness direction.

Piezoelectric film, piezoelectric module, and method of manufacturing piezoelectric film

An ultrasonic sensor includes an element substrate having a first and a second surface at an opposite side of the first surface, including an opening section piercing through the element substrate in a Z direction from the first to second surface, a vibrating plate on the first surface of the element substrate to close the opening section, a plurality of vibration regions extending along an X direction orthogonal to the Z direction on the vibration plate in positions overlapping the opening section, and a plurality of piezoelectric elements to correspond to the plurality of vibration regions of the vibration plate. The opening section includes, on the first surface, a first and second side parallel to the X direction and a third and fourth side coupling end portions in the X direction of the first and second sides at an acute or obtuse angle to the first and the second side.

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Matsumoto, Japan

Koji Ohashi