Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Koji Nomura

Hisahito Ogawa

Kazunari Nishihara

Takeshi Masutani

Hirofumi Tajika

Yoshihiro Tomita

Kazuhiko Fujikawa

Akio Takimoto

Koji Akiyama

Junko Asayama

Katsumasa Miki

Yasunori Kuratomi

Michihiro Miyauchi

Keiji Onishi

Hiroshi Nakatsuka

Ryoichi Takayama

Mitsuhiro Furukawa

Atsushi Abe

Ryouichi Takayama

Keizaburo Kuramasu

Tetsuro Shimamura

Yukinori Sasaki

Shinji Umeda

Masako Yamaguchi

Motoyuki Toji

Kiyotomo Kubota

Hirohumi Tajika

Motoyuki Taji

Tokumi Kotani

Tutomu Nakanishi

Masanori Minamio

Masaya Nakatani

Teruhiro Shiono

Toshiyuki Nozoe

Tsuneharu Nitta

Kazuki Komaki

Hiroshi Fujii

Isaku Kanno

Toru Sakuragawa

Akihiko Ibata

Tetsuhiro Korechika

Tsutomu Nakanishi

Satoshi Ouchi

Yasuhiko Yokota

Junji Kajiwara

Yuji Murashima

A vibration power generating device includes a first substrate and a second substrate, a first electrode formed on the first substrate, a fixed structural body, elastic structural bodies which connect the first substrate and the fixed structural body with each other, and a second electrode formed on the second substrate. Since the overlapping area of the electrodes is increased by arranging rectangular or square conductor parts of the first electrode and rectangular or square conductor parts of the second electrode in a checkerboard pattern, a generation region where power is generated by vibration is increased.

Vibration power generator, vibration power generating device and communication device having vibration power generating device mounted thereon

An electret electrode is constituted by forming a conductive film on a substrate, laminating a first insulating film and a second insulating film alternatively on the conductive film, and then disposing electret films in which a lower surface, an upper surface and a side surface are covered with a third insulating film and a fourth insulating film. Existing of the first insulating film and the second insulating film between the electret films and the conductive film enables an increase in electric field intensity in the film when the same electric charge is retained, while enables an increase in surface charge density (surface potential) when the electric field intensity is the same.

Silicon oxide electret electrode with laminate insulating film surrounding short conductive film

A microphone includes: a substrate including a tone hole and having a top surface on which a substrate electrode is provided; a converter provided on the top surface of the substrate and including a main body having a back space, a diaphragm provided at the bottom of the back space of the main body, and a converter electrode provided on a region of a bottom surface of the main body facing the substrate electrode; and a bump connecting the substrate electrode and the converter electrode to each other. The diaphragm vibrates in response to sound entering from the tone hole. The converter converts sound into a signal.

Microphone and method for fabricating the same

An actuator includes a base, an arm having an elastic property and supported by the base, electrostatic-driving electrodes provided on the base and the arm, respectively, and a piezoelectric-driving layer. The piezoelectric-driving layer includes a first electrode layer on the arm, a piezoelectric layer on the first electrode layer, and a second electrode layer on the piezoelectric layer. This actuator can be driven quickly with a low voltage.

Actuator, switch using the actuator, and method of controlling the actuator

The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.

Drop shock measurement system and acceleration sensor element used in the same

A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.

Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro

A fluid ejection device, such as for an ink jet printer or the like, having increased increasing nozzle density. A through-hole ( ) is provided in a glass substrate ( ) to which a second silicon substrate ( ) is directly bonded to form an ink outlet ( ). The first silicon substrate ( ) is etched to form a pressure chamber ( ), an ink channel ( ) and an ink inlet ( ), and bonded directly to the glass substrate ( ). A piezoelectric thin film ( ), having a conductive, elastic body ( ), is bonded to the first substrate covering the pressure chamber ( ). The elastic body ( ) is sandwiched between the piezoelectric thin film ( ) and a resin layer ( ). The second substrate ( ) has a thickness of less than about 0.8 mm in a range of thickness comprising about 1.2 to about 1.9 times (rg-rs), wherein rg is the diameter of the wide end of the through-hole ( ) and rs is the diameter of the narrow end of the through-hole ( ).

Fluid ejection device and process for the production thereof

A method for manufacturing a bimorph type piezoelectric element including a first step of providing a first piezoelectric single-crystal plate having a first surface and a second surface; a second step of providing a second piezoelectric single-crystal plate having a third surface and a fourth surface; a third step of directly bonding the third surface of the second piezoelectric single-crystal plate to the first surface of the first piezoelectric single-crystal plate without using any adhesives; a fourth step of forming a freely vibrating part by grinding away the second surface of the first piezoelectric single-crystal plate to a first depth and with a first spacing; and a fifth step of producing an element having a supporting member and the freely vibrating part by cutting the first piezoelectric single-crystal plate and second piezoelectric single-crystal plate with the freely vibrating part included, which have been prepared in the fourth step, with a predetermined spacing and at least in one of the directions of rows and columns.

Method for manufacturing a bimorph piezoelectric device for acceleration sensor

The present invention relates to an apparatus for detecting an object-to-be-printed and aims at providing an apparatus for detecting an object-to-be-printed which is capable of discriminating whether the object-to-be-printed is plain paper or special paper. The apparatus includes an infrared sensor for detecting infrared rays radiated by heating the object-to-be-printed with heating means and is capable of discriminating whether the object-to-be-printed is plain paper or special paper.

Object-to-be-printed detector and print detecting method

An acceleration sensor having a well controlled dispersion in the detection characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate ( ), a second piezoelectric plate ( ) bonded to the first piezoelectric plate ( ) by direct bonding, a first external electrode ( ) provided on the main surface of the first piezoelectric plate ( ) and a second external electrode ( ) provided on the main surface of the second piezoelectric plate ( ). The first piezoelectric plate ( ) and the second piezoelectric plate ( ) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter &ldquo;L&rdquo; in the cross section; thickness of the supporting section ( ) is greater than that of the rest part (free vibration section).

Acceleration sensor and acceleration apparatus using acceleration sensor

A recording device capable of accurately detecting the presence and absence of ink particles ejected from plural ejecting outlets aligned in a lateral direction of a head thereof. In the recording device, the sensing field of an infrared sensor is directed toward flying ink particles but directed toward landed particles. Whereby the thermal energy from the landing ink particles remarkably increases a thermal energy applied to infrared sensor.

Recording device

The present invention relates to an infrared detector element to detect infrared rays by means of a pyroelectric material, and an infrared sensor unit and an infrared detecting device using the infrared detector element and has an object of realizing an omnidirectional infrared detector element that can gain an output against an object to be detected moving in whatever directions. In order to accomplish this object, the present invention proposes a setup comprising a pair of first electrodes ( ), which have a function of absorbing infrared rays, are close to trapezoidal in shape, respectively, and are disposed on one of the surfaces of a pyroelectric material ( ) with electrical connections made in such a way that the first electrodes are opposite to each other in polarity, and a pair of second electrodes ( ) disposed on the other surface of the pyroelectric material ( ) and electrically connected with each other, in which the lower side of the close to trapezoidal shape of the first electrodes ( ) of one hand is aligned in the same direction as the lower side of the close to trapezoidal shape of the second electrodes ( ) of the other hand, thereby producing an effect of gaining an output against an object to be detected making a movement from whatever directions.

Infrared detector element, and infrared sensor unit and infrared detecting device using it

A sensor in which a field effect transistor element having a gate electrode on its rear side is electrically connected onto a resistive element having a top surface electrode and a bottom surface electrode in such a way that the gate electrode and a portion of the top surface electrode of the resistive element coincides, and a grounding electrode on a substrate is electrically connected with the bottom surface electrode of the resistive element so that they coincides.

Method of manufacturing sensor and resistor element

An acceleration sensor having a well controlled dispersion in the detection, characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate ( ), a second piezoelectric plate ( ) bonded to the first piezoelectric plate ( ) by direct bonding, a first external electrode ( ) provided on the main surface of the first piezoelectric plate ( ) and a second external electrode ( ) provided on the main surface of the second piezoelectric plate ( ). The first piezoelectric plate ( ) and the second piezoelectric plate ( ) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter &ldquo;L&rdquo; in the cross section; thickness of the supporting section ( ) is greater than that of the rest part (free vibration section).

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Nara, Japan

Koji Nomura