Average Co-Inventor Count = 1.33
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (4 from 10,341 patents)
4 patents:
1. 11473182 - Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component
2. 10808309 - Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component
3. 9828690 - Component of substrate processing apparatus and method for forming a film thereon
4. 8999475 - Component of substrate processing apparatus and method for forming a film thereon