Kabushiki Kaisha Toshiba

Koji Matsuo

Tsutomu Sato

Shinji Mori

Takaharu Itani

Kazuhiko Nakamura

Yusuke Kawaguchi

Kenya Kobayashi

Kenji Maeyama

A semiconductor device includes a first semiconductor region, a second semiconductor region between a first gate electrode and a second gate electrode that is disposed apart from the first gate electrode in a first direction, third and fourth semiconductor regions provided on respective portions of the second semiconductor region, an insulating region provided between the third semiconductor region and the fourth semiconductor region, and an electrode provided on the third semiconductor region and the fourth semiconductor region and electrically connected to the third semiconductor region and the fourth semiconductor region. The fourth semiconductor region is parallel to the third semiconductor region in a direction intersecting the first direction. The fourth semiconductor region has an impurity concentration higher than that of the second semiconductor region. A lower end of the insulating region is positioned lower than a boundary surface of the second semiconductor region and the third semiconductor region.

Semiconductor device

A semiconductor device includes a first pMISFET region having an Si channel, a second pMISFET region having an Si channel and an nMISFET region having an Si channel. First SiGe layers which apply first compression strain to the Si channel are embedded and formed in the first pMISFET region to sandwich the Si channel thereof and second SiGe layers which apply second compression strain different from the first compression strain to the Si channel are embedded and formed in the second pMISFET region to sandwich the Si channel thereof.

A semiconductor device manufacturing method has conducting first heating processing at a first heating temperature in an inert atmosphere under a first pressure in a first process chamber to silicide an upper part of the source-drain diffusion layer and form a silicide film; conducting second heating processing at a second heating temperature in an oxidizing atmosphere under a second pressure in a second process chamber to selectively oxidize at least a surface of the metal film on the element isolating insulation film and form a metal oxide film; conducting third heating processing at a third heating temperature which is higher than the first heating temperature and the second heating temperature in an atmosphere in a third process chamber to increase a concentration of silicon in the silicide film; and selectively removing the metal oxide film and an unreacted part of the metal film on the element isolating insulation film.

Semiconductor device manufacturing method

Manufacturing method of a semiconductor device

Growing community of inventors

Yokohama, Japan

Koji Matsuo