Seiko Epson Corporation

Seiko Epson Company

Koji Kitahara

Masahiro Fujii

Kazuhiko Sato

Taro Takekoshi

Tomohiro Makigaki

Hiroyuki Maruyama

Akira Sano

Shigeo Nojima

Keiichi Mukaiyama

Susumu Shinto

Tadaaki Hagata

Seiichi Fujita

Nozomu Hirokubo

Yasushi Matsuno

Tomonori Matsushita

Yoshifumi Hano

Tomoki Sakashita

Motoki Itoda

A vibration device includes a base having a first surface and a second surface that is in a front-back relationship with the first surface, a vibrator disposed at the first surface, and a lid having a first recess that opens toward the first surface, a third surface that is the bottom surface of the first recess, and a fourth surface that is in a front-back relationship with the third surface, the lid being so bonded to the first surface that the vibrator is encapsulated in the first recess, and the lid has a second recess that is part of the third surface recessed toward the fourth surface and includes a diaphragm formed of the bottom surface of second recess and the fourth surface.

Vibration device and method for manufacturing vibration device

A circuit board includes a semiconductor substrate having a first surface and a second surface located on an opposite side from the first surface, a through hole penetrating the first surface and the second surface, an organic insulating film disposed on the first surface and a side surface of the through hole, and a conductor disposed on an opposite side of the organic insulating film from a side surface side of the through hole. The side surface of the through hole has a first side surface coupled to the first surface and having a width decreased from the first surface toward the second surface, and a second side surface coupled to the second surface from an end portion of the first side surface on a second surface side.

Circuit board, method for manufacturing circuit board, and resonator device

A resonator device includes: a base including a semiconductor substrate; a resonator element; and a lid to be bonded to the base, the lid and the base forming a cavity for accommodating the resonator element. An integrated circuit is disposed at the semiconductor substrate, the integrated circuit including an oscillation circuit electrically coupled to the resonator element, a memory circuit configured to store a reference value of an output characteristic of the resonator element, and a determination circuit configured to compare a detection value of the output characteristic of the resonator element with the reference value and determine an airtight state inside the cavity based on a comparison result.

Resonator device and method for manufacturing resonator device

An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror.

Variable wavelength interference filter, optical module, and optical analysis device

An optical filter includes a stationary substrate and a movable substrate disposed so as to be opposed to each other, a first reflecting film disposed on a movable substrate side of the stationary substrate, a second reflecting film disposed on a stationary substrate side of the movable substrate, and opposed to the first reflecting film, a first protective film disposed so as to overlap the first reflecting film, and having a light transmissive property and electrical conductivity, a second protective film disposed so as to overlap the second reflecting film, and having a light transmissive property and electrical conductivity, a first terminal connected to the first protective film, and a second terminal connected to the second protective film. An electrical connection of the first terminal and the second terminal is electrically switchable.

Optical filter, optical module, electronic apparatus, and method of manufacturing optical filter

A wavelength tunable interference filter includes an electrostatic actuator that changes the dimension of a gap between a fixed reflection film and a movable reflection film, a fixed drawn electrode and a movable drawn electrode that are connected to the electrostatic actuator, and a third substrate having a top surface portion and a sidewall portion. An end surface of the sidewall portion is bonded to a first substrate so that a space surrounded by the top surface portion, the sidewall portion, and the first substrate is hermetically sealed. A second substrate and the electrostatic actuator are disposed in the space, and the fixed drawn electrode and the movable drawn electrode are disposed on the first substrate and extend both inside and outside the space.

Wavelength tunable interference filter, method for manufacturing wavelength tunable interference filter, optical module, and electronic apparatus

An interference filter includes first and second reflecting films opposed to each other across a gap, the first and second reflecting films include an Ag&#x2014;Sm&#x2014;Cu alloy film or an Ag&#x2014;Bi&#x2014;Nd alloy film, the Ag&#x2014;Sm&#x2014;Cu alloy film includes 0.1 atomic %&#x2266;Sm&#x2266;0.5 atomic %, and 0.1 atomic %&#x2266;Cu and &#x2266;0.5 atomic %, and Sm+Cu&#x2266;1.0 atomic %, the Ag&#x2014;Bi&#x2014;Nd alloy film includes 0.1 atomic %&#x2266;Bi&#x2266;3.0 atomic %, and 0.1 atomic %&#x2266;Nd&#x2266;5.0 atomic %, and the thickness of the Ag&#x2014;Sm&#x2014;Cu alloy film or the Ag&#x2014;Bi&#x2014;Nd alloy film is &#x2267;10 nm and &#x2266;40 nm.

Interference filter having Ag&#x2014;Bi&#x2014;Nd alloy film

An etalon (tunable interference filter) includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflection film disposed on the fixed substrate, a movable reflection film disposed on the movable substrate and facing the fixed reflection film via a gap, a fixed electrode disposed on the fixed substrate, and a movable electrode disposed on the movable substrate and facing the fixed electrode. A movable insulating film is stacked on a surface of the movable electrode on the side of the fixed electrode, the movable electrode has a compressive stress, and the movable insulating film has a tensile stress.

Tunable interference filter, optical module, and electronic device

A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate.

Wavelength variable interference filter, optical module, and light analyzer

An optical filter comprising a first substrate, a second substrate having a support portion which supports the first substrate, a first optical film provided on the first substrate, a second optical film provided on the second substrate and arranged to face the first optical film, a first protective film covering at least the first optical film, a second protective film covering at least the second optical film, a first bonding film, a portion of the first bonding film overlapping a surface of the first protective film in a plan view but does not overlapping the first optical film and a second bonding film, a portion of the second bonding film overlapping a surface of the second protective film in the plan view but does not overlapping the second optical film.

Optical filter and method for manufacturing optical filter

A method of manufacturing a variable wavelength interference filter includes forming an electrostatic gap forming groove, a wiring forming groove extending from the electrostatic gap forming groove to an outer peripheral edge of the chip region, and an air communication groove through which the wiring groove forming groove communicates with the outside of the first substrate, in a chip region of a first substrate.

Method of manufacturing variable wavelength interference filter and variable wavelength interference filter

An electrostatic actuator comprises: a fixed electrode formed on a substrate; a movable electrode placed at an position opposing the fixed electrode via a predetermined gap; a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode: and an insulation film made of HfAlOformed on an opposing surface of at least one of the fixed electrode and the movable electrode.

Electrostatic actuator, droplet discharging head, method of manufacturing thereof and droplet discharging device

A silicon nozzle plate includes nozzles each with a first nozzle portion having a circular cross-section and a second nozzle portion having a circular cross-section wherein the circular cross-section of the first nozzle portion is smaller than the circular cross-section of the second nozzle portion. In one embodiment the nozzle plate is utilized in an inkjet head and includes a recess having a flat bottom surface that commonly communicates with a plurality of first nozzle portions and a through hole that exposes terminal portions that supply control signals to pressure generators.

Ejection device and inkjet head with silicon nozzle plate

A method for manufacturing an electrostatic actuator comprises a vibrating plate, an electrode plate facing the vibrating plate, and a vibrating chamber formed between the electrode plate and the vibrating plate, wherein the vibrating plate is displaced by electrostatic force, by applying voltage between the vibrating plate and the electrode plate, the method comprises: a process for forming a pressure compensating chamber communicating with the vibrating chamber; a process for forming a displacement plate at a portion of the pressure compensating chamber, displaceable according to external atmospheric pressure, into a warped form curved so as to protrude in a direction away from the facing inner wall of the pressure compensating chamber; and a process for shutting off and sealing the pressure compensating chamber from the external atmosphere, along with the vibrating chamber.

Method for manufacturing an electrostatic actuator

An electrostatic ink-jet head ( ) in which the present invention is applied comprises a pressure chamber ( ) communicating with an ink nozzle ( ), and an atmospheric pressure chamber ( ) opened to the atmosphere, with a vibrating plate ( ) being provided on the base plane of the pressure chamber ( ). Voltage applied between the vibrating plate ( ) and an electrode ( ) causes the vibrating plate ( ) to vibrate due to electrostatic force, thereby discharging ink droplets. A vibrating chamber ( ) communicates with a pressure compensating chamber ( ), and a displacement plate ( ) capable of being displaced in the direction outward from the plane according to fluctuations in the external, atmospheric pressure is formed at the base plane of the pressure compensating chamber ( ). Displacement of the displacement plate ( ) increases/decreases the volume of the pressure compensating chamber ( ), and the internal pressure of the vibrating chambers ( ) communicating thereof is adjusted to match the external atmospheric pressure. Accordingly, the vibration properties of the vibrating plate ( ) can be maintained constant even when the external atmospheric pressure fluctuates, and proper ink droplet discharging action can be maintained.

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Ina, Japan

Koji Kitahara