Tokyo Electron Limited

Koji Kamata

Akiyoshi Mitsumori

Kohei Otsuki

Hiroshi Ikari

Energy consumption of a temperature control unit can be reduced. A flexible pipeincludes a bellows pipemade of a metal and an inner tube. The inner tubeis provided at an inner side of the bellows pipe, and an inner surface of the inner tube where a fluid flows is smooth. The inner surface of the inner tubewhere the fluid flows may be smoother than a surface of a braided body. Further, the inner tubemay be made of, for example, a conductive material. An inner side of the inner tubewhere the fluid flows may be coated with a conductive film.

Flexible pipe and temperature control system

Condensation on a member of a processing apparatus can be suppressed. A condensation suppressing method of suppressing condensation in a processing apparatus configured to perform a processing on a processing target object includes a first measurement process, a second measurement process and a first control process. In the first measurement process, a first surface temperature of a member of the processing apparatus, which is exposed within a closed space, is measured. In the second measurement process, a dew-point temperature of air within the closed space is measured. In the first control process, a supply amount of low-dew-point air, which has a dew-point temperature lower than a dew-point temperature of air outside the processing apparatus, into the closed space is controlled based on the first surface temperature and the dew-point temperature of the air within the closed space.

Condensation suppressing method and processing system

A measurement system for measuring a consumption amount of a focus ring in a plasma etching apparatus including a processing chamber, a lower electrode and the focus ring surrounding a periphery of the lower electrode, comprises a sensor substrate having a distance sensor and a measurement unit configured to measure a consumption amount of the focus ring. The measurement unit includes a transfer instruction unit, an acquisition unit and a measurement unit. The transfer instruction unit is configured to instruct a transfer unit to transfer the sensor substrate into the processing chamber. The acquisition unit is configured to acquire information on a physical amount corresponding to a distance from the distance sensor to the focus ring, which is measured by the distance sensor. The measurement unit is configured to measure a consumption amount of the focus ring based on the acquired information on the physical amount.

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Miyagi, Japan

Koji Kamata