L'air Liquide,societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude

Koji Ishida

Kazutaka Yanagita

Shingo Okubo

Kohei Tarutani

Toshiyuki Nakagawa

Terumasa Koura

Ikuo Suzuki

Kazuma Suzuki

Mikio Goto

Koji Matsumoto

Supply system include a first vessel containing the precursor, a second vessel, a first gas conduit fluidically connecting the first vessel to the second vessel, wherein a pressure reduction device and a flow control device are fluidically mounted therein, a second gas conduit fluidically connecting the second vessel to a point of use, and a pressure gauge downstream the pressure reduction device for measuring a partial pressure of the precursor in the second vessel, wherein the partial pressure of the precursor in the second vessel is at a pressure lower than the saturated vapor pressure of the precursor at the temperature of the second vessel and higher than an inlet pressure requirement of the flow control device at the point of use. Methods for using the supply system are also disclosed.

Supply system for low volatility precursors

Growing community of inventors

Tsukuba, Japan

Koji Ishida