Shin-etsu Chemical Co., Ltd.

Tokyo Electoron Limited

Koji Hagiwara

Junichi Arami

Nobuo Kawada

Kenji Ishikawa

Noboru Kimura

Shoji Kano

Nobuo Arai

Disclosed is a crucible of pyrolytic boron nitride (PBN) for molecular beam epitaxy for melting of the source material, with which the troubles due to adhering of the molten source material in the form of drops caused on the quality of the epitaxial layer can be greatly decreased. Namely, the inner surface of the crucible is free from pits or other irregularities responsible to the adhering of the melt when the growth plane, which can be exposed by stripping of the surface layer of 0.50 mm thickness by cleavage, has a surface roughness Ra not exceeding 2.0 .mu.m and Rmax not exceeding 18 .mu.m. Such a PBN crucible can be prepared by the CVD method to deposit PBN on the surface of a graphite core of which the surface roughness Ra does not exceed 2 .mu.m.

Crucible of pyrolytic boron nitride for molecular beam epitaxy

A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.

Ceramic electrostatic chuck with built-in heater

Growing community of inventors

Gunma-ken, Japan

Koji Hagiwara