Renesas Electronics Corporation

Hitachi Ulsi Systems Co., Ltd.

Renesas Technology Corp.

Koji Fujishima

Masashi Sahara

Kazuhisa Higuchi

Taku Kanaoka

Yoshio Fukayama

Yutaro Ebata

Tsuyoshi Kachi

Koichiro Sakanishi

A semiconductor device includes plural electrode pads arranged in an active region of a semiconductor chip, and wiring layers provided below the plural electrode pads wherein occupation rates of wirings arranged within the regions of the electrode pads are, respectively, made uniform for every wiring layer. To this end, in a region where an occupation rate of wiring is smaller than those in other regions, a dummy wiring is provided. On the contrary, when the occupation rate of wiring is larger than in other regions, slits are formed in the wiring to control the wiring occupation rate. In the respective wirings layers, the shapes, sizes and intervals of wirings below the respective electrode pads are made similar or equal to one another.

Semiconductor device and a method of manufacturing the same

A general insulated gate power semiconductor active element with many gate electrodes arranged in parallel has a laminated structure including a barrier metal film and a thick aluminum electrode film formed over the gate electrodes via an interlayer insulating film. When the aluminum electrode film is embedded in between the gate electrodes in parallel, voids may be generated with the electrodes. Such voids allow the etchant to penetrate in wet etching, which may promote the etching up to a part of the electrode film in an active cell region which is to be left. Thus, an insulated gate power semiconductor device is provided to include gate electrodes protruding outward from the inside of the active cell region, and a gate electrode coupling portion for coupling the gate electrodes outside the active cell region. The gate electrode coupling portion is covered with a metal electrode covering the active cell region.

Power semiconductor device having gate electrode coupling portions for etchant control

Semiconductor device with pads overlapping wiring layers including dummy wiring

Growing community of inventors

Kofu, Japan

Koji Fujishima