Gigaphoton Inc.

Koji Ashikawa

Osamu Wakabayashi

Akiyoshi Suzuki

Masaki Arakawa

Yasuhiro Kamba

A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.

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Oyama, Japan

Koji Ashikawa