Tokyo Electron Limited

Hitachi-kokusai Electric Inc.

Koji Aramaki

Toshiyuki Aritsuka

Shinjiro Watanabe

Sumie Nakabayashi

Yuichi Onami

Naoki Hashiguchi

A substrate misalignment detection method includes: acquiring first image information or first position information of a substrate held to a stage by suction at a first height position; delivering the substrate from the stage to a holder in a state in which the suction of the substrate is released and causing the holder to hold the substrate at the first height position; acquiring second image information or second position information of the substrate held at the first height position; and detecting misalignment of the substrate by comparing the first image information with the second image information or by comparing the first position information with the second position information.

Substrate misalignment detection method, substrate position abnormality determination method, substrate transfer control method, and substrate misalignment detection device

On the basis of state change information acquired by one of sensor nodes forming a sensor network, an instruction indicative of emitting a signal is issued to another node to acquire a photographed image from a camera. An image processing device identifies the ID and actual position of the node by issuing the signal issuance instruction to the node and detecting a signal obtained from the node from the photographed image. On the basis of personal information stored in a database, the image processing device detects a not-allowed action.

Node management system and node managing program using sensing system

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Tokyo, Japan

Koji Aramaki