Kabushiki Kaisha Toshiba

Kioxia Corporation

Koichiro Kawano

Hideo Iwasaki

Tomiya Sasaki

Shusaku Matsumoto

Akihiro Kasahara

Yuusuke Sato

Katsumi Hisano

Masato Akita

Hiroshi Fujita

Ryosuke Yagi

Naoki Sugihara

Shigeru Kinoshita

Yoshinori Kitamura

Hisashi Tachizaki

Yutaka Sata

Ko Minakami

Toshio Maeda

Toshinori Terashima

Shiguma Kato

A substrate processing apparatus of an embodiment includes: a processing tank that stores a processing solution and houses a plurality of substrates that are to be processed with the processing solution, with the substrates being arranged in a predetermined direction; an inner wall provided in the processing tank to cover at least a partial portion of a substrate surface located at one end in terms of the arrangement direction of the substrates and at least partial portions of side surfaces, of the substrates, that line up along the arrangement direction, with a space where the processing solution flows being present between the inner wall and a bottom surface of the processing tank; and a processing solution nozzle provided at a position that is in the processing tank and outside the inner wall and opening in a manner to cause an upward flow to be formed inside the inner wall.

Substrate processing apparatus

A substrate processing device according to the present embodiment includes a processing tank configured to be capable of accumulating a liquid. A conveyer can array a plurality of semiconductor substrates in such a manner that front surfaces of the semiconductor substrates face a substantially horizontal direction, and transport the semiconductor substrates into the processing tank. A plurality of liquid suppliers can supply the liquid toward an inside of the processing tank from a lower portion of the processing tank. A plurality of current plates are arranged on at least either one end side or the other end side of an array of the semiconductor substrates. The current plates are provided in a first gap region above the semiconductor substrates in gaps between the conveyer and a sidewall of the processing tank on both sides of the conveyer as viewed from an array direction of the semiconductor substrates.

Substrate processing device

A fuel cell include a membrane electrode assembly including an anode, a cathode opposed to the anode, and an electrolyte membrane interposed between the anode and the cathode; a lyophobic porous body in contact with the anode; and an anode passage plate in contact with the lyophobic porous body, the anode passage plate including a gas collection passage and a fuel supplying passage, the gas collection passage collects a gas generated in the anode via the lyophobic porous body, the fuel supplying passage supplies a fuel to the anode via the lyophobic porous body.

Fuel cell

A thermal cycler is provided with a number of containing members having a shape in conformity with a shape of micro tubes , nozzles for jetting coolant to the respective containing members , a blower for supplying the coolant to the nozzles , heaters wound around the respective containing members , thermocouples provided to be brought into contact with the respective containing members and a control apparatus for generating signals of the heaters based on signals from the thermocouples and outputting the generated signals. By carrying out independent temperature control for the respective micro tubes by the control apparatus , accuracy of temperature control of the respective micro tubes is promoted and the processing efficiency is promoted.

Thermal cycler and DNA amplifier method

An X-ray CT system includes a fixed frame portion and a rotating frame portion. Being provided with X-ray tubes, the rotating frame portion is arranged so as to rotate with respect to the fixed frame portion. Vane members for feeding air are secured on the rotating frame portion. In operation, with the rotation of the vane members together with the rotating frame portion, cool air is introduced into the rotating frame portion. Consequently, heated instruments, such as the X-ray tubes, in the rotating frame can be cooled down effectively.

X-ray computerized tomography system having cooling features

A heat sink according to the invention comprises a multilayered body prepared by laying one upon the other a plurality of heat sink fin elements having pin-fin sections formed by cutting a number of slits through thin plates of a thermally conductive material with spacers, each being inserted between two adjacent heat sink fin elements to separate them by a given distance. The method of preparing a heat sink comprises steps of preparing heat sink fin elements by forming a number of slits and a surrounding marginal frame area in each of a first set of thermally conductive thin plates, preparing spacers by cutting out a central area of and forming a surrounding marginal frame area in each of a second set of thermally conductive thin plates having a shape same as that of the first set of thin plates, laying said heat sink fin elements and said spacers alternately one upon the other and bonding said assembled heat sink fin elements and spacers together at the outer surface or contacted areas to form a multilayered body.

Heat sink and the producing method thereof

Growing community of inventors

Kamakura, Japan

Koichiro Kawano