Toray Engineering Company, Limited

Koichi Mimura

Kenji Sato

Masanori Akita

Fujio Murai

Hiromitu Wada

In a probe apparatus comprising an inspecting device, an intermediate substrate and a probe substrate, in which the inspecting device is electrically connected to a proximal end of the intermediate substrate, and the intermediate substrate has a distal end electrically connected to a proximal end of the probe substrate, and the probe substrate has a distal end electrically connectable to a substrate under inspection, a plurality of probe substrates are electrically connected to the single intermediate substrate. When a particular probe substrateis damaged, only the particular probe substratemay be changed, the other probe substratescontinuing to be used, thereby achieving economy.

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Otsu, Japan

Koichi Mimura