Hitachi Unisia Automotive, Ltd.

Hitachi, Ltd.

Unisia Jecs Corporation

Koichi Kusuyama

Masao Tsukada

Yoshihiro Kogure

A displacement sensor includes a plurality of conductive members, a semiconductor device, and a nonmagnetic conductor electrically connecting one of the conductive members and one of a low electric potential side and a high electric potential side of a power supply of the semiconductor device. The conductive member is electrically connected with the semiconductor device through a nonmagnetic conductor.

Displacement sensor

A rotation angle sensor includes a rotatable magnet, at least one yoke located at a position to confront a magnetic pole, and a magnetic sensing device to sense magnetic flux density varying in accordance with a confronting area between the yoke and the magnet. The yoke is electrically connected with the magnetic sensing device through a nonmagnetic conductor.

Rotation angle sensor

A bonding pad for outputting an output of a piezoresistive element to an integrated circuit is disposed on one side of a sensor substrate, and the sensor substrate is adhered to a package at only a rear side of the bonding pad.

Pressure sensor and manufacturing method of pressure sensor

A sensing device of the present invention includes a first resistive branch having first and second resistors connected in series, a second resistive branch comprising third and fourth resistors connected in series and arranged in parallel with the first resistive branch to form a bridge circuit, first and second feed wiring arrangements connecting the first and second resistive branches to a power source side, respectively, in parallel to each other, and a ground wiring arrangement connecting the first and second resistive branches to a ground side.

Sensing device

In a pressure sensor in which a frame shaped protruding potion is formed on a surface side of a substrate by means of an etching process, and a blocking plate is connected to an upper part of the protruding portion, to form a standard pressure chamber, a recess is formed on at least one of the substrate and the blocking plate that constitute the standard pressure chamber, to increase the height of the standard pressure chamber, thereby preventing the lowering of pressure detection accuracy due to foreign substances within the standard pressure chamber.

Pressure sensor and method of manufacturing pressure sensor

A pressure sensor including a substrate having a diaphragm portion. A diaphragm-defining recess is recessed inwardly from one surface of the substrate to define the diaphragm portion between a bottom surface of the recess and an opposite surface of the substrate. A recess is disposed within the diaphragm portion. A pressure sensitive arrangement is disposed in the substrate, a detector portion of which is disposed within the recess formed within the diaphragm portion.

Growing community of inventors

Gunma, Japan

Koichi Kusuyama