Entegris, Inc.

Koichi Kurata

Dmitri Menn

Marc Brian Laverdiere

Hirokazu Kuwabara

John Paul Puglia

Ben Mai Pak Lee

Kalyan Madhavaram

Louis Barrows, Jr

J Karl Niermeyer

John Karl Niermeyer

Craig Wallace Martland

The present disclosure relates to purification cassettes that have reinforcing features. One embodiment relates to a purification cassette with tensions members. A purification system may include a removable cassette defining a media cavity. A set of tension members may span between a first sidewall and second sidewall. The set of tension members can divide the media cavity into a plurality of lanes.

Purifier cassette

The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

Purification system with manifold assembly and removable filter cassette

Growing community of inventors

Yonezawa, Japan

Koichi Kurata