Rigaku Corporation

Koichi Kato

Masashi Kageyama

Masahiro Nonoguchi

Tomohiro Chaki

Masaru Kuribayashi

Manabu Noguchi

Masaaki Yamakata

Yuji Kusaka

Ryuji Nishida

Provided are an X-ray generator capable of easily measuring a beam size of an electron beam on an electron target, and an adjustment method therefor. The X-ray generator includes an electron target including a first metal, a second metal different from the first metal, and a third metal different from the second metal, which are sequentially arranged side by side along a first direction in a continuous manner.

X-ray generator and adjustment method therefor

Provided is an X-ray generator comprising a cathode for generating electrons; a rotating anode having a cylindrical electron impingement surface, an X-ray focal point being formed by a region in which the electrons impinge upon the electron impingement surface; and a Wehnelt electrode for imparting an electric field to the electrons emitted from the cathode. The Wehnelt electrode has a field formation surface for forming the electric field, and an electron passage aperture formed by the field formation surface. The field formation surface of the Wehnelt electrode is inclined with respect to a plane tangent to an outer circumferential surface of the rotating anode at the center of the X-ray focal point. The center of the cathode is in a plane orthogonal to the field formation surface and aligned with the center of the electron passage aperture.

X-ray generator

Provided is an X-ray generator for generating X-rays from an X-ray focal point that is a region in which electrons emitted from a filament impinge upon a rotating anode. The X-ray generator has a Wehnelt electrode for surrounding the filament, an attachment part formed integrally with the Wehnelt electrode, a pedestal to which the attachment part is attached, and a casing for housing the pedestal and the anticathode. The width of the space in which the anticathode is housed by the casing is less than the width of the space in which the pedestal is housed by the casing. The Wehnelt electrode extends into the space in which the anticathode is housed by the casing, in a state in which the attachment part is attached to the pedestal.

Growing community of inventors

Hamura, Japan

Koichi Kato