Kabushiki Kaisha Komatsu Seisakusho

Koichi Kajiyama

Osamu Wakabayashi

Masahiko Kowaka

Kaoru Saito

Yasuhiro Nozue

Yasuo Itakura

Kazuaki Sajiki

Tadayoshi Yamaguchi

Junichi Fujimoto

Noritoshi Ito

Norio Moro

Yasao Itakura

Method and apparatus for sensing the wavelength of a laser beam

A reduced projection light source comprises a laser device for emitting laser light having a transverse mode of multimodes, and an etalon located between a chamber of the laser device and a total reflection mirror. The light source is used as an exposure light source for transfer printing an ultrafine pattern on a semiconductor wafer.

Light source for reduced projection

Multi-mode narrow-band oscillation excimer laser

A recess is formed on the upper surface of a cover sealing a laser chamber for accommodating plurality of capacitors for applying discharge voltage across a pair of discharge electrodes thus decreasing the cross-sectional area of a circuit loop passing discharge current. In a modified embodiment, a preliminary ionization gap is provided for a return rod constituting the circuit loop.

Gas laser device

A method of and an apparatus for quantitative analysis in accordance with CARS wherein a first system filled with a material to be measured and a second system filled with a reference material of known concentration are disposed in series; first laser light of a first frequency for excitation is applied to these systems together with second laser light having frequency of wide band width; light passed through these two systems, respectively, is applied to a spectrograph provided with, a multi-channel detector; and quantitative analysis for the material to be measured is effected on the basis of a ratio of intensity between the signal outputs generated in respective different channels of the multi-channel detector and corresponding to the material to be measured and to the reference material respectively. Furthermore, anti-Stokes' light emitted between rotational levels of hydrogen is utilized in the case of quantitative analysis of hydrogen.

Method of and apparatus for quantitative analysis in accordance with CARS

Growing community of inventors

Fujieda, Japan

Koichi Kajiyama