Mitsubishi Electric Corporation

Ebara Corporation

Allied Telesis Holdings K.k.

Koichi Kagawa

Takahiro Mori

Tadahiro Yoshida

Toru Kimura

Naoki Tanaka

Masahiro Arioka

Toshihiro Matsunaga

Takeshi Kawamura

Munetaka Kashiwa

Hideki Miyatake

Yoshiki Yoshioka

Eiji Morito

Kenji Onishi

For the purpose of obtaining a switchgear that can perform a reliable operation, the switchgear includes: opening and closing coils that drive a movable element, opening and closing capacitors that supply energy to the coils, opening and closing control sections that perform control of charging the capacitors and of energizing the coils, an opening coil that drives the movable element to the open side, an opening capacitor frat supplies energy to the coil, a second opening control section that performs control of charging the opening capacitor and of energizing the opening coil, and an interlock circuit that energizes the second opening control section; and a signal showing that the second opening control section is in operation is supplied to an interlock circuit.

Switchgear

A basic unit portion configured by a standard unit and a variable unit portion whose shape is configured to be changeable. The basic unit portion includes: a first pressure tank with a first opening portion; a circuit breaker; a first bushing; a first disconnecting switch. The variable unit portion includes: a busbar; a second pressure tank with a second opening portion; a second bushing whose necessary number is disposed in accordance with the number of circuits to be externally connected; and second disconnecting switches which are arranged between the busbar and the second bushing. The first opening portion of the basic unit portion and the second opening portion of the variable unit portion are joined facing each other to form into a constitutional body.

Gas insulated switchgear

Distribution board

The present invention relates to an evacuation apparatus for evacuating a vacuum chamber of a substrate processing apparatus for processing a substrate such as a semiconductor wafer or liquid crystal panel. An evacuation apparatus according to the present invention includes a first vacuum pump connected to a vacuum chamber, and a second vacuum pump connected to the first vacuum pump. The first vacuum pump has a pair of multistage pump rotors.

Evacuation apparatus

A circuit breaker is accommodated in a circuit breaker compartment such that a contacting/separating direction of a contact of the circuit breaker is along a vertical direction, a cable terminal of a first cable connected to one terminal of the circuit breaker via a first disconnector is accommodated in a first connection compartment such that a central conductor of the cable terminal is along the vertical direction, and a disconnector compartment which accommodates the first disconnector such that a contacting/separating direction of a contact of the first disconnector is along the vertical direction, is joined so as to be disposed between the circuit breaker compartment and the first connection compartment.

Gas-insulated switchgear

Provided are: a vacuum interrupter having a fixed contact and a movable contact; a fixed side mounting plate which supports a fixed side conductor; and an operating mechanism which is coupled to a movable side conductor and performs opening and closing operation of both the contacts. The fixed side mounting plate is configured such that a plurality of plate-like members are overlapped; an exposed portion of the fixed side conductor is attached with a divided terminal which has a fitting hole to be fitted to the exposed portion and is formed with a slit in a radial direction from the fitting hole; and the divided terminal is fixed to the fixed side mounting plate and the fixed side conductor is supported by the fixed side mounting plate via the divided terminal.

Switching apparatus

A table management method allowing efficient hash search with suppressing the possibility of occurrence of rehashing is disclosed. A MAC address table is divided into a plurality of banks, which are simultaneously accessed according to a hash output. Each of registered MAC addresses read out from respective ones of the banks is compared to the input MAC address. When a match is indicated by at least one comparison result, the input MAC address is judged to have been registered in the MAC address table. When no match is indicated by all comparison results, the input MAC address is judged as a new MAC address. If an available memory area is left in memory space of the banks concurrently accessed according to the hash output, then the new MAC address is registered in the available memory area.

Growing community of inventors

Tokyo, Japan

Koichi Kagawa