Adv Antest Corporation

Koichi Higashide

Yukio Ishigaki

A propagation delay time measuring method of measuring a propagation delay time of a test signal propagating along one of a first signal path serially connecting to the first signal path through which a semiconductor testing apparatus includes a driver and a comparator electrically connected to a device under test.

Propagation delay time measuring method and testing apparatus

Signal propagation times TA TA TA . . . of respective pin selection paths of a pin selection device that selectively connects output pins of a semiconductor device testing apparatus to a timing measurement device are measured in advance, and the measured values are memorized. At the time of timing calibration, calibration pulses are transmitted to a timing calibrators via respective test pattern signal transmission paths and respective pin selection paths to measure delay time values T T T - - - of respective channels. The known values TA TA TA - - - are subtracted from the measured values T T T - - - , respectively. A timing calibration is performed by adjusting delay time values of the timing calibrators of the respective test pattern signal transmission paths such that each of the respective differences between the TA TA TA - - - and the measured values T T T - - - become a constant value TC.

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Tokyo, Japan

Koichi Higashide