Seiko Epson Corporation

Youtec Co., Ltd.

Koichi Furuyama

Takeshi Kijima

Eiji Natori

Yuzo Tasaki

Yuuji Honda

To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention relates to ferroelectric ceramics including a first Sr(TiRu)Ofilm and a PZT film formed on the first Sr(TiRu)Ofilm, wherein the x satisfies a formula 1 below.0.01&#x2264;&#x2264;0.4&#x2003;&#x2003;formula 1

Electrode, ferroelectric ceramics and manufacturing method thereof

To obtain a piezoelectric film having excellent piezoelectric properties. One aspect of the present invention relates to ferroelectric ceramics including a ZrOfilm oriented in (200), a Pt film that is formed on the ZrOfilm and is oriented in (200) and a piezoelectric film formed on the Pt film.

Ferroelectric ceramics and manufacturing method thereof

A method of manufacturing a ceramic includes forming a film which includes a complex oxide material having an oxygen octahedral structure and a paraelectric material having a catalytic effect for the complex oxide material in a mixed state, and performing a heat treatment to the film, wherein the paraelectric material is one of a layered catalytic substance which includes Si in the constituent elements and a layered catalytic substance which includes Si and Ge in the constituent elements. The heat treatment includes sintering and post-annealing. At least the post-annealing is performed in a pressurized atmosphere including at least one of oxygen and ozone. A ceramic is a complex oxide having an oxygen octahedral structure, and has Si and Ge in the oxygen octahedral structure.

Piezoelectric device having a ferroelectric film including a ferroelectric material

Piezoelectric device having a ferroelectric film including a solid solution

Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element

A method of manufacturing a ceramic film includes forming the ceramic film by crystallizing a ceramic raw material liquid which includes a first raw material liquid and a second raw material liquid. The first raw material liquid and the second raw material liquid are different types of liquids, the first raw material liquid is a raw material liquid for producing a ferroelectric, the second raw material liquid is a raw material liquid for producing an oxide such as an ABO-type oxide, a solvent included in the first raw material liquid and a solvent included in the second raw material liquid have different polarities, and the ceramic film is formed in a state in which the first raw material liquid and the second raw material liquid are phase separated so that first crystals formed of the first raw material liquid are intermittently formed in a surface direction of the ceramic film and second crystals formed of the second raw material liquid are formed so as to interpose between the first crystals.

Ceramic film and method of manufacturing the same, ferroelectric capacitor, semiconductor device, and other element

A method of manufacturing a ceramic film includes a step of forming a ceramic filmby crystallizing a raw material body. The raw material bodycontains different types of raw materials in a mixed state. The different types of raw materials differ from one another in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials. According to this manufacturing method, a surface morphology of the ceramic film can be improved.

Ceramic film and method of manufacturing the same, semiconductor device, and piezoelectric device

A method of manufacturing a ceramic film includes a step of forming a ceramic film by crystallizing a raw material body The raw material body contains different types of raw materials in a mixed state. The different types of raw materials differ from one another in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials. According to this manufacturing method, a surface morphology of the ceramic film can be improved.

Growing community of inventors

Sayama, Japan

Koichi Furuyama