Kabushiki Kaisha Motoyamaseisakusho

Kohichi Murakami

Tadahiro Ohmi

Osamu Uchisawa

Yohichi Kanno

A supply control apparatus for semiconductor process gasses which is capable of accurately switching the timing of the supply state of the gasses flowing in accordance with the open or closed states of a plurality of gas pressure operated valves, which operate in response to a plurality of electromagnetic valves operating in time series. The content volumes of a plurality of gas tubes respectively connecting the plurality of electromagnetic valves to the plurality of drive units of the gas pressure operated valves are determined as a function of the length of time elapsed between the application of the control signal and the time the special gas is supplied to a process unit. The apparatus permits accurate switching of the supply state of the special gasses and avoids the mixing of the semiconductor process gasses.

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Miyagi, Japan

Kohichi Murakami