Hitachi, Ltd.

Kohichi Hayakawa

Takashi Hiroi

Mari Nozoe

Yasutsugu Usami

Yasuhiko Nara

Kazuhisa Machida

Hiroshi Morioka

Maki Ito

Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by irradiating white light, a laser beam, or a charged particle beam are set, its operating efficiency can be improved. An inspection target region of an inspection-subject substrate is displayed, and a designated map picture plane and an image of an optical microscope or an electron beam microscope of a designated region are displayed in parallel, thereby enabling a defect distribution and a defect image to be simultaneously seen. Item names of inspecting conditions and a picture plane to display, input, or instruct the contents of the inspecting conditions are integrated, those contents are overlapped to the picture plane and layer-displayed, and all of the item names are displayed in parallel in a tab format in the upper portion of the picture plane of the contents. When a desired item name is clicked, the picture plane is switched and the contents corresponding to the clicked item name are displayed.

Inspection method, apparatus and system for circuit pattern

Growing community of inventors

Hitachinaka, Japan

Kohichi Hayakawa