Shimadzu Corporation

Kohei Oue

Osamu Ashida

Fusao Nakamura

A vacuum pump which, among others, has a lubricated ball bearing for supporting a rotor shaft of a motor, a bearing holder for holding the lubricated ball bearing, a first labyrinth seal provided between a motor arrangement space and a bearing arrangement space, and a balance adjustment member installed at a position of the rotor shaft to face the bearing holder and used for balance adjustment of a rotating body. A second concave and convex part to be fitted to the first concave and convex part forming the first labyrinth seal. By reducing a gap of the bearing arrangement space, the space in which the oil vapor is filled is reduced. Therefore, a moving amount of the gas, and thus, the decrease in the base oil of the lubricant can be suppressed, thereby extending the lubricating life.

Vacuum pump

A rotary vacuum pump includes a pump casing on which an intake port flange is formed, a rotor which has a rotating side evacuating device and is driven to rotate at high speed inside the pump casing, and a fixing side evacuating device which is provided inside the pump casing and generates an evacuating effect together with the rotating side evacuating device. The intake port flange is fastened to a device subject to evacuating by a bolt. A through-hole is formed in the intake port flange for inserting the bolt and has a diameter larger than that of the bolt. A gap forming device for forming a gap between the bolt and the through-hole in the intake port flange is provided on a matching surface of the through-hole.

Growing community of inventors

Kyoto, Japan

Kohei Oue