Nhk Spring Co., Ltd.

Kohei Hironaka

Toshio Kazama

Kazuya Soma

Tsuyoshi Inuma

Mitsuhiro Kondo

Hiroshi Nakayama

Shuji Takahashi

Yoshio Yamada

Shigeki Ishikawa

Kazuya Souma

Osamu Ito

Satoshi Shoji

Toru Nakamura

Takashi Nidaira

Ryosuke Yamaguchi

Tomohiro Yoneda

Yosuke Mabune

A probe unit includes: a signal probe configured to receive and output a signal from and to a predetermined circuit structure; a power supply probe configured to supply power to the predetermined circuit structure; a grounding probe configured to supply a ground potential to the predetermined circuit structure; and a conductive probe holder including a plurality of hole portions in which the signal probe, the power supply probe, and the grounding probe are insertable, the plurality of hole portions having a same hole shape as one another, wherein the signal probe, the power supply probe, and the grounding probe inserted into the plurality of hole portions are interchangeable with one another to change an arrangement of the signal probe, the power supply probe, and the grounding probe.

Contact probe and probe unit

A contact probe includes: a cylindrical pipe member; a collar including a hollow portion and fixed to an inner circumferential side of at least one end in a longitudinal direction of the pipe member; and an inner conductor including a flange configured to abut on a stepped portion formed by the pipe member and the collar, the inner conductor being expandable and contractible along the longitudinal direction and penetrating the pipe member.

A probe unit includes: a plurality of contact probes each of which has one end that is brought into contact with a contacting electrode, the one end being an end in a longitudinal direction; a first ground member connected to an external ground; a second ground member provided around each of the contact probes; a connecting member electrically connected to the first ground member, and electrically connected to one end of the second ground member; and a probe holder configured to hold the contact probes, the first ground member, the second ground member and the connecting member.

Probe unit

A conductive contactor unit includes: a signal conductive contactor configured to input or output a signal to or from a predetermined circuit structure, the signal conductive contactor including a first plunger, a second plunger, and a spring member; and a conductive contactor holder configured to house the signal conductive contactor used for inputting and outputting the signal to and from the predetermined circuit structure, the conductive contactor holder having a coaxial structure with the signal conductive contactor, and including a holder substrate including an opening configured to allow the signal conductive contactor to be inserted therethrough, a holding member housed in the opening, and including a holding hole configured to hold one or more of the signal conductive contactors, and a stab configured to form a hollow space extending from the holding hole in a direction perpendicular to a central axis of the holding hole.

Conductive contactor unit

Provided is a conductive probe having a first end portion and a second end portion opposing the first end portion. The first end portion includes first to fourth linear ridges and first to fifth vertexes, and the first to fourth linear ridges are spaced from one another and arranged to form a cross. The first to fourth vertexes are located on an outer circumference of the first end portion and further arranged between the first linear ridge and the second linear ridge, between the second linear ridge and the third linear ridge, between the third linear ridge and the fourth linear ridge, and between the fourth linear ridge and the first linear ridge, respectively.

Conductive probe for inspection and semiconductor inspection device

A test unit according to the present invention includes: a first contact probe contacting with an electrode provided on a front surface of one of contact targets, and contacting with an electrode of the other contact target; a second contact probe contacting with an electrode provided on a back surface of the one of contact targets and contacting with an electrode of a substrate; a first probe holder including a suction holder that sucks and holds the one of contact targets, and accommodating and holding therein the first contact probes; a second probe holder accommodating and holding therein the second contact probes; and a base portion, which is layered over the first probe holder and holds the other contact target at a side thereof layered over the first probe holder; and a gap is formed between the other contact target and the first probe holder.

Test unit

A probe unit according to the present invention is suitable for allowing a large current to flow. In the probe unit that accommodates a plurality of contact probes for electrically connecting an inspection target object and a signal processing device used to output an inspection signal, both ends of a large current probe () are electrically connected to electrodes of a contact target object, and a large current is made to flow via a metal block () that comes into contact with both end portions of the large current probe ().

A probe-unit base member having high rigidity and requiring no troublesome operations for its manufacture and a probe unit are provided. To achieve the purpose, the probe-unit base member includes a conductive substratethat has a first openingcapable of fitting therein a probe holderand a second openingcommunicated with the first opening; a coatingthat is made of an insulating adhesive agent and is coated at least on an edge of the second opening; and an insulating guide memberthat is bonded to the edge of the second openingthrough the coatingand guides one of two contact bodies to a position in contact with probes

Probe-unit base member and probe unit

A probe unit includes: large diameter probes; small diameter probes; a large-diameter probe holder having large hole portions which individually hold the large diameter probes, and reception hole portions which have diameters smaller than those of the large hole portions, communicate with the large hole portions, and receive end portions of the small diameter probes so that the end portions come into contact with the large diameter; and a small-diameter probe holder probes having small hole portions which individually hold the small diameter probes. The central axes of the large hole portion and the small hole portion that communicate with each other are separated from each other, and the small hole portions include two small hole portions which are adjacent to each other and of which central axes are separated from each other by a distance shorter than a distance between the central axes of two large hole portions that are corresponding to the two small hole portions.

Provided are a conductive contact holder and a conductive contact unit that enable a test to be performed in a precise temperature environment. For this objective, a construction includes a holder substrate that individually receives plural conductive contacts, and a floating member attached to the holder substrate such that a distance from a surface of the holder substrate is varied within a predetermined range by an external force. The floating member has plural hole sections into which a front end section of each of the conductive contacts received in the holder substrate is inserted. A gap between the holder substrate and the floating member forms at least a part of a passage of fluid introduced from outside of the conductive contact holder.

Conductive contact holder and conductive contact unit

A conductive contact holder includes an insulating holder member and a conductive block member. The insulating holder member is made of an insulating material and includes a first insertion hole through which a signal conductive contact inputting and outputting a signal to and from a circuit is directly inserted over substantially its full length. The conductive block member is made of a conductive material and includes a second insertion hole through which the ground conductive contact is inserted in partial contact therewith.

Conductive contact holder

A first needle-like member includes a columnar member formed by a conductive material such as a metal material with its up-and-down direction being longitudinal, and a contact member formed on a semiconductor integrated circuit (body to be contacted) side with respect to the columnar member, which are integrally formed. In the columnar member, a through hole is formed in the longitudinal direction of the first needle-like member. The through hole has opening ends on both sides thereof Thus, in the process of manufacturing the needle-like member, the contact member is formed on a rod-like body being a raw material from the same direction as a drill insertion direction to form the through hole.

Growing community of inventors

Nagano, Japan

Kohei Hironaka