Hitachi High-tech Corporation

Kohei Chiba

Muneyuki Fukuda

Yohei Minekawa

Takanori Kishimoto

Provided is a technique capable of achieving both throughput and robustness for a function of adjusting brightness (B) and contrast (C) of a captured image in a charged particle beam device. The charged particle beam device includes a computer system having a function (ABCC function) of adjusting the B and the C of an image obtained by imaging a sample. The computer system determines whether adjustment is necessary based on a result obtained by evaluating a first image obtained by imaging an imaging target of the sample (step S), executes, when the adjustment is necessary based on a result of the determination, the adjustment on a second image of the imaging target to set an adjusted B value and an adjusted C value (step S), and captures a third image of the imaging target based on the adjusted setting values to generate an image for observation (step S).

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Tokyo, Japan

Kohei Chiba