Mega Fluid Systems, Inc.

Koh I Murai

David D Kandiyeli

Michael Perkins, Ii

Robert Eiseler

An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.

Apparatus and method for recirculating fluids

A vortex reduction cap for use within a fluid holding vessel above a discharge port for discharging the fluid from the vessel is disclosed. The vortex reduction cap includes a top solid surface greater than or equal to the area of the discharge port. The vortex reduction cap includes one or more inlets to allow fluid to flow from the vessel to an internal volume of the vortex reduction cap and then to the discharge port in the vessel. A passive element is positioned within the internal volume of the vortex reduction cap so that the flow of fluids through the cap and towards the discharge port of the vessel will be redirected around the passive element.

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Yamhill, OR, United States of America

Koh I Murai