Renesas Electronics Corporation

Kodai Ozawa

Sho Nakanishi

Disclosed is a technique for enhancing adhesion between a semiconductor substrate and a back surface electrode covering the back surface thereof. In particular, the enhancing adhesion technique includes: providing a semiconductor substrate SB having a main surface and a back surface opposite to the main surface, the back surface including n-type silicon; forming a first metal layer on the back surface of the semiconductor substrate SB, the first metal layer including nickel and vanadium which has a thermal diffusion coefficient smaller than that of nickel; performing a heat treatment to the semiconductor substrate to react silicon contained in the semiconductor substrate with nickel contained in the first metal layer to form a NiSiV layer in contact with the back surface of the semiconductor substrate; and forming a second metal including titanium on the NiSiV layer.

Semiconductor device and method of manufacturing the same

The semiconductor device has the main surface, the semiconductor substrate having the first impurity region formed on the main surface, the first electrode formed on the main surface having the first impurity region, the insulating film formed on the main surface such that surround the first electrode, the second electrode formed on the insulating film such that spaced apart from the first electrode and annularly surround the first electrode, and the semi-insulating film. The first electrode has the outer peripheral edge portion. The semi-insulating film is continuously formed from on the outer peripheral edge portion to on the second electrode. The outer peripheral edge portion includes the first corner portion. The second electrode has the second corner portion facing the first corner portion. The semi-insulating film on the insulating film is removed between the first corner and the second corner portion.

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Tokyo, Japan

Kodai Ozawa