Entegris, Inc.

Kobold Yang

Han Yi Wang

Hee Jun Yang

Bob Shie

Matthew A Fuller

Colton J Harr

Wei Sheng Hsu

A filter that is self-locking to a filter manifold includes a flange having a major axis and a minor axis in plan view, and that is longer along the major axis than the minor axis. The filter further includes a stopper on the major axis, that can contact a filter manifold when the filter is inserted into the manifold and rotated. The filter can be used with a filter manifold having a slot with an opening having a width greater than the length of the minor axis and smaller than the length along the major axis of the flange, and past the opening, has sufficient width to accommodate the length of the major axis. This arrangement allows the flange to be inserted into the slot in an insertion orientation, but does not permit the flange to pass through the opening of the slot when it is in a locking position.

Self-locking manifold and filter

A purge port assembly for a wafer container includes a purge module configured to allow inlet flow of purge gas and a transition portion disposed over an intermediate outlet of the purge module. The transition portion includes a receiver configured to receive the purge gas discharged from the purge module, an outlet connector configured to attach with a diffuser, and an intermediate conduit. The intermediate conduit connects the receiver to the outlet connector and extends from the receiver at an acute angle relative to an axis of the inlet opening of the receiver. The intermediate conduit has a length that spaces apart the outlet connector from the receiver. A wafer container includes a shell and a purge port assembly. The shell includes an interior space. The purge port assembly extends through an opening in the shell into the interior space.

Wafer container purge port assembly

Filter endcap applicable to bottom of filter cartridge

Filter connector

Growing community of inventors

Hsinchu, Taiwan

Kobold Yang