United Microelectronics Corp.

Ko-Wen Chiu

Wen-Sheng Chien

Wei-Chen Hsin

An object is set to move back and forth between a first position and a second position in a cylinder. A measurement point between the first position and the second position is preset. A counted period indicating a duration that the object moves from the first position to the first measurement point is obtained. Then a movement behavior parameter is obtained according to the counted period. Whether the movement behavior parameter of the object matches a specified condition is determined. If matching occurs, a warning message is generated.

Monitor apparatus and method for detecting movement behavior of object in cylinder

A metal etching system has an etching chamber defined by quartz walls. Coils provided around the quartz walls of the etching chamber are used to apply a high frequency electrical field to at least a portion of the etching chamber. Containment walls are provided around the coils. An endpoint detection system is provided for the etching system which includes an optical fiber which extends through the containment wall and the coils, with an end of the optical fiber disposed in fixed relationship to the quartz walls of the etching chamber. A fixture mounts the optical fiber in the containment wall. An air-tight seal, such as an O-ring compressed around the optical fiber and compressed against the containment wall, is provided to limit air flow along the optical fiber to the surface of the etching chamber walls. The O-ring or similar air-tight seal prevents air from flowing from outside of the containment wall to the surface of the etching chamber wall which would otherwise locally cool the etching chamber walls and cause material to deposit onto the chamber walls.

Growing community of inventors

Hsinchu County, Taiwan

Ko-Wen Chiu